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Vacuum Chambers

Vacuum chambers are the heart of a vacuum system. Our product range includes small to large-format chambers suitable for virtually any application.

Vacuum Chambers for Fine to Ultra-High Vacuum

Standard vacuum chambers

Our product range of standard vacuum chambers offers a quickly available and cost-efficient alternative to custom-manufactured vacuum chambers. You can combine various standardized basic bodies with freely selectable chamber outlets to create a vacuum solution tailored to your application.

The standard vacuum chambers are designed for ambient pressure usage up to 1 · 10-7 hPa (mbar).
  • chambers_for_mass_spectrometers

    Chambers for mass spectrometers

    Designed to maintain ultra-high vacuum, ensuring the accuracy of ionization and ion detection.

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  • High vacuum chamber

    High vacuum chambers

    Operate at pressures between 10-3 to 10-7 mbar (mbar), typically using turbomolecular or diffusion vacuum pumps.

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  • Medium vacuum chamber

    Medium vacuum chambers

    Operate at pressures between 10-1 to 10-3 mbar (mbar), suitable for a wide range of industrial applications like leak testing or packaging.

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  • modular_vacuum_chambers

    Modular vacuum chambers

    Customizable to allow modification of size and configuration for specific experiments or processes.

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Customized vacuum chambers

Customized vacuum chamber
With our extensive experience, we can provide detailed advice on your chamber specification, design, and engineering. Starting from your requirements – whether a sketch or a complete set of drawings – our team of engineers, physicists, technicians, and designers develops a custom vacuum chamber tailored to your application.

On request, we can put together a complete vacuum system consisting of pumps, measurement technology, components, and valves.
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Understanding UHV chamber design

Customized vacuum chamber
While system design addresses the overall architecture, the chamber itself remains a cornerstone of UHV performance. When the gas flow becomes molecular – meaning particles interact primarily with chamber walls, not each other, the surface quality, cleanliness, and material choice is critical to achieve UHV.
Learn more in our FAQ section

FAQ

What to know about ultra-high vacuum chamber design?

A well-designed ultra-high vacuum chamber typically includes:

  • Material Choice: Austenitic stainless steel is preferred due to its low gas content and high corrosion resistance.
  • Thermal Management: All materials and components must withstand bake-out temperatures to reduce outgassing. Stainless steel and copper match well due to similar thermal expansion. Aluminum is more limited.
  • Welding and Fabrication: Internal welds are favored to avoid virtual leaks. Twin welds should be avoided, as they can trap gases. Design should also minimize blind holes and rough surfaces.
  • Cleaning Process: Final preparation often includes an ultrasonic bath, demineralized water rinse, and vacuum annealing, ensuring minimal contamination.
Additionally, controlling tracer gas flows during leak testing is essential - using tools such as short gas lines, helium spray guns, and two-stage reducers.

What is the function of a vacuum chamber and where is it used?

A vacuum chamber is a hermetically sealed container for the exclusion of air and gases, which can be evacuated via a vacuum pump. It encloses the application and shields it from external influences. Vacuum chambers are used in rough vacuum as well as in medium, high and ultra-high vacuum applications. The possible uses extend across wide fields of application in industry, R&D, analytics, coating, and semiconductor technology.

How are vacuum chambers from Pfeiffer adapted to my needs?

Vacuum chambers from Pfeiffer meet the highest standards of quality and technology. Our goal is to offer you individual, efficient vacuum solutions that are perfectly tailored to you and your needs.

With many years of experience in numerous areas of vacuum technology, we understand the application-specific requirements for vacuum generation. Our expertise is reflected in the design of our vacuum chambers. Our standard vacuum chambers, we offer an economical and readily available solution that we can adapt to your specific requirements. We are happy to assist you in your selection. In addition, you can freely combine our vacuum chambers with any type of vacuum pump according to your needs.

What advantages do Pfeiffer's vacuum chambers offer?

With our high-quality vacuum chambers in individual and series production, we can supply you with the perfect vacuum solution. Pfeiffer offers all processes from a single source: application consulting, design, manufacturing, quality assurance, assembly and on-site service.

  • Leak testing of all vacuum chambers manufactured by us, with residual gas analysis if required
  • Versatile application possibilities thanks to optimum adaptability to customer-specific technical requirements
  • A diverse range of equipment options, tailored to your needs
  • Safe and reliable vacuum solutions for fine to ultra-high vacuum
  • Comprehensive service with consulting, planning, manufacturing and installation from a single source

What are the advantages of customized vacuum chambers?

Customized vacuum chambers offer optimal adaptation possibilities tailored to your specific needs, ensuring the perfect fit for your application. Built with high-quality materials, they are designed for maximum durability and long-term reliability. Additionally, customized chambers can be extended with a wide range of add-on parts as well as accessories to adapt and upgrade your system as required.