Vacuum Gauges

Reliable total pressure management in vacuum applications

For each application, the appropriate vacuum gauge can be selected based on the required accuracy, pressure range, and physical measurement principle. Our gauges are equipped with optimized accessories and ensure smooth communication via preferred interfaces.

Product lines

DigiLine

Devices with digital signal output
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ActiveLine

Devices with analog signal output
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ModulLine

Total pressure measurement in areas with ionizing radiation
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CenterLine

Gauges with state-of-the-art controllers and automatic detection
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Handheld measurement instruments

Battery-operated devices for mains-independent use
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Custom solutions

Gauges for unique customer needs
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Measuring packages

Complete packages including everything to operate vacuum meters
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DigiLine

Devices with digital signal output

The DigiLine transmitters are designed for industrial and research applications requiring easy-to-install and reliable total pressure measurement. The gauges cover a wide vacuum range using Piezo, Pirani, capacitive, hot cathode, and cold cathode sensors. Each transmitter has an RS-485 interface, allowing up to 16 measuring points to be connected to a controller.

Options for connectivity include Profibus-DP, Profinet, and EtherCAT interfaces, or an additional analog output with two switching points and an LCD display.

Fail-safe communication with a PC or a PLC
M12 connectors and IP54 protection for reliable operation in harsh environments
Modern interfaces (industrial Ethernet and fieldbuses)

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ActiveLine

Devices with analog signal output

The ActiveLine series includes a wide selection of vacuum meters with different measurement principles and classic analog output.These gauges cover a broad vacuum range from ultra-high vacuum to overpressure. The pressure-proportional output voltage of the transmitters can be displayed as pressure by the three control units or read into control systems via analog inputs for further processing.

Space-saving installation thanks to the compact design
Installation errors are prevented by control devices with automatic transmitter detection
Easy cabling for all transmitters thanks to a uniform standard cable with Hirschmann plug

The ActiveLine devices are also available with a different plug under the series name CenterLine. CenterLine devices are compatible with active transmitters from other manufacturers.

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ModulLine

Gauges for total pressure measurement in areas with ionizing radiation

The ModuLine series does not contain any electronics, making it suitable for use in high-radiation environments.

The series includes three Pirani TPR vacuum gauges with a measuring range of 1,000 to 8 · 10^-4 hPa (mbar), three IKR cold cathode gauges with a measuring range of 5 · 10^-3 to 1 · 10^-11 hPa (mbar) and two IMR hot cathode gauges with a measuring range of 1 · 10^-2 to 2 · 10^-12 hPa (mbar).

Proven durability
Enables challenging applications
Sensor and electronics can be placed separately

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CenterLine

Gauges with modern controller technology

The CenterLine series offers a comprehensive selection of vacuum gauges featuring different measurement principles and analog output. These gauges work reliably across a measurement range from high vacuum to atmospheric pressure. Up to three gauges can be paired with advanced controllers, which enable convenient data handling through a USB interface for data export or Ethernet for network communication. The controllers are equipped with LCD displays for easy reading of measured values.

CenterLine gauges are compatible with active gauges from other manufacturers, allowing for simple replacement or supplementation of current equipment.

Gauges are automatically detected by the controllers, allowing easy installation
Devices can be connected using standard connectors such as 15 D-sub, RJ45, and FCC 68
The CNR Series offers corrosion-resistant diaphragm sensors and self-heated versions for higher accuracy in applications involving corrosive or hot gases, such as coating

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Hand-held measuring devices

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Battery-operated devices for mains-independent use

There are two battery-operated hand-held measuring devices with displays. The TPG 201 operates on the heat conduction principle (Pirani), while the TPG 202 Neo also includes a piezo-resistive pressure sensor for the higher pressure range.

Depending on the model, these hand-held measuring devices cover a pressure range from 1,200 hPa (mbar) to 5 · 10^-5 hPa (mbar). The TPG 202 Neo features a compact design, a rugged silicone protective cover, and a large internal memory for data logging without special software.

Mechanical pressure gauges are particularly useful when venting a vacuum chamber. They display the pressure relative to the ambient pressure on a scale from -1 to 0.6 bar, are bakeable, suitable for UHV and do not require a power supply.

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Custom solutions

Gauges for unique customer needs

To meet our customers' needs, we offer some vacuum gauges that do not fit into our standard series. These include the CLR gauges of the CLR 39x type, specifically designed for use on steam-sterilizable freeze dryers.

The sensor of these temperature-controlled capacitive vacuum gauges is heated to a constant 160 °C, enabling very precise pressure measurement in the range from 10 hPa (mbar) to 1 · 10^-3 hPa (mbar). These gauges are controlled via PLC and are optionally available with an easily sterilizable TriClamp flange.

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Measuring packages

Complete measuring equipment consists of a transmitter, control unit and cables. The cables are available in various standard lengths and are suitable for different temperature ranges. You will find the right selection for the gauge in the selected product and also via the accessories.

We offer attractive packages for the most common products, but individual configurations are also possible, especially if you plan to expand the system in the future. If you are unsure which measurement solution is right for you, please contact your sales representative to receive support in selecting the appropriate products.

ActiveLine packages DigiLine packages

Measurement methods

Direct and gas-independent or indirect and gas-dependent?

When monitoring a process condition with a small pressure range, a measurement principle from the following overview can be selected based on the pressure range.

There are indirect measurements that determine the pressure via a gas property. These naturally provide a measurement result that is dependent on the gas type. Direct measurements, on the other hand, are independent of the gas type.

The corresponding accuracies and reproducibility are also listed. Depending on the required precision, the accuracy demands and the cost of the measuring device will vary.

Gas type-dependent measurement

Pirani

Measuring principle: Thermal conductivity of gases
Pressure range: Rough to high vacuum (1 · 10³ to 1 · 10^-4 hPa (mbar))
Accuracy requirement: Low to medium

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Cold cathode

Measuring principle: Electron emission from a cold cathode
Design: Penning, inverted magnetron
Pressure range: High to ultra-high vacuum (1 · 10^-2 to 1 · 10^-11 hPa (mbar))
Accuracy requirement: Medium

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Hot cathode

Measuring principle: Electron emission from a hot cathode
Design: Bayard-Alpert, extractor system
Pressure range: Ultra-high to extremely high vacuum (1 · 10^-2 to 1 · 10^-12 hPa (mbar))
Accuracy requirement: High

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Measurement independent of gas type

Capacitive

Measuring principle: Change in capacitance between electrodes
Pressure range: Medium to high vacuum (1 · 10³ to 1 · 10^-5 hPa (mbar))
Accuracy requirement: High

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Piezo-resistive

Measuring principle: Change in the resistance of the strain gauges with pressure
Pressure range: Rough to medium vacuum (1 · 10³ to 1 · 10^-1 hPa (mbar))
Accuracy requirement: Medium

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Cleaning and calibration

For reliable measurement values

Some vacuum gauges become more contaminated than others, primarily due to the process in which they are used. Proper cleaning can extend their lifetime.

In addition, measuring equipment must be regularly calibrated with standards because the quality of a process depends on how accurately the measured values are maintained. This is required by the ISO 9001 quality management standard. To meet this requirement, we offer a calibration service and calibration vacuum pump units if you wish to perform the calibration yourself.

FAQ

How to select the right vacuum gauge?

Each vacuum gauge is based on a different physical principle and is more suitable for certain applications than others. The pressure range of a vacuum gauge is determined by the measurement principle used as well as the design and structure of the measuring device.

The criteria for selecting a vacuum gauge depend on the following factors:

Measuring range
Required accuracy
Gas composition (inert or corrosive)
Environmental conditions such as ionizing radiation or strong magnetic fields
Type of interface (analog or digital signal)

In addition to the actual measuring devices, there are accessories that simplify handling such as display, evaluation and documentation. While vacuum gauges can determine only the total pressure, mass spectrometers are used for partial pressures.

How can vacuum gauges be used in vacuum systems?

For larger ranges, it may be necessary to combine several types of vacuum gauges with the same and/or different measuring principles. This can be done by integrating multiple individual gauges into one system or by using combination gauges.

Depending on the requirements and combinations, the desired accuracy can be determined in the corresponding pressure ranges to control the entire process, from chamber evacuation to subsequent flooding. The available combinations are:

Piezo/Pirani
Pirani/capacitive
Pirani/hot cathode
Pirani/cold cathode

Available flange shapes
The most commonly used flange shapes are ISO-KF (standard) and CF flanges. Some gauges are also available with an easily sterilizable TriClamp flange, VCR, or thread. For applications involving high temperatures, vacuum gauges with extended flanges are available to increase the distance from the heat source.

How to evaluate your vacuum gauge?

Vacuum gauges detect changes in pressure and convert those changes into electrical signals that can be interpreted by the user. There are two types of signals that vacuum gauges can generate: analog and digital. The selection of signal type and interface depends on the specific application requirements, such as the need for real-time data exchange, integration of multiple measuring devices, and the importance of user-friendliness.

The required hardware and software as well as the complexity and maintenance effort of the interface should also be taken into account.

The two standard device series, DigiLine and ActiveLine, are active vacuum meters, meaning the electronic components are housed with the actual measurement equipment.