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Vacuum Pumps

Discover our wide range of pumps for vacuum generation


From rough to ultra-high vacuum, we offer a diverse selection of reliable and powerful vacuum pumps. Learn more about our products and solutions for various applications in semiconductor, industry as well as Research & Development.

Product finder

Turbomolecular vacuum pumps

Turbomolecular vacuum pumps are high-speed vacuum pumps used in combination with backing pumps to achieve extremely high vacuum levels down to 10-11 hPa (mbar). They are oil-free and very energy-efficient. Turbopumps find application in demanding fields such as plasma etching, surface analysis and coating technology.
  • turbopumps_stage

    Turbopumps with hybrid or magnetic bearing systems

    HiPace
  • turbo_vacuum_pump_splitflow_1

    Modular turbopumps tailored to customer needs

    SplitFlow
  • ath_m_turbopumps

    Turbopumps with 5-axis magnetic bearing system

    ATH-M / ATP-M
    • turbopumps_stage

      Turbopumps with hybrid or magnetic bearing systems

      HiPace
    • turbo_vacuum_pump_splitflow_1

      Modular turbopumps tailored to customer needs

      SplitFlow
    • ath_m_turbopumps

      Turbopumps with 5-axis magnetic bearing system

      ATH-M / ATP-M

Turbomolecular vacuum pumps

Turbomolecular vacuum pumps are high-speed vacuum pumps used in combination with backing pumps to achieve extremely high vacuum levels down to 10-11 hPa (mbar). They are oil-free and very energy-efficient. Turbopumps find application in demanding fields such as plasma etching, surface analysis and coating technology.
  • turbopumps_stage

    Turbopumps with hybrid or magnetic bearing systems

    HiPace
  • turbo_vacuum_pump_splitflow_1

    Modular turbopumps tailored to customer needs

    SplitFlow
  • ath_m_turbopumps

    Turbopumps with 5-axis magnetic bearing system

    ATH-M / ATP-M
    • turbopumps_stage

      Turbopumps with hybrid or magnetic bearing systems

      HiPace
    • turbo_vacuum_pump_splitflow_1

      Modular turbopumps tailored to customer needs

      SplitFlow
    • ath_m_turbopumps

      Turbopumps with 5-axis magnetic bearing system

      ATH-M / ATP-M

Vacuum boosters

In combination with suitable backing pumps, oil-free vacuum boosters provide a robust and reliable solution for fast pump-down. They can be used flexibly and customized for many applications.
  • booster_vacuum_pumps_hilobe_1

    Intelligent and flexible vacuum boosters

    HiLobe
    • booster_vacuum_pumps_hilobe_1

      Intelligent and flexible vacuum boosters

      HiLobe

Vacuum boosters

In combination with suitable backing pumps, oil-free vacuum boosters provide a robust and reliable solution for fast pump-down. They can be used flexibly and customized for many applications.
  • booster_vacuum_pumps_hilobe_1

    Intelligent and flexible vacuum boosters

    HiLobe
    • booster_vacuum_pumps_hilobe_1

      Intelligent and flexible vacuum boosters

      HiLobe

Diaphragm vacuum pumps

Diaphragm vacuum pumps offer dry vacuum generation and are therefore ideal for applications where an oil-free environment is required. Their quiet performance and compact design make them ideal for use in medical devices, laboratory equipment, and analytical applications.
  • diaphragm_pumps_mvp_neo

    Compact and dry diaphragm vacuum pumps

    MVP
    • diaphragm_pumps_mvp_neo

      Compact and dry diaphragm vacuum pumps

      MVP

Diaphragm vacuum pumps

Diaphragm vacuum pumps offer dry vacuum generation and are therefore ideal for applications where an oil-free environment is required. Their quiet performance and compact design make them ideal for use in medical devices, laboratory equipment, and analytical applications.
  • diaphragm_pumps_mvp_neo

    Compact and dry diaphragm vacuum pumps

    MVP
    • diaphragm_pumps_mvp_neo

      Compact and dry diaphragm vacuum pumps

      MVP

Multi-stage Roots vacuum pumps

Our multi-stage Roots vacuum pumps operate without lubricants or sealing materials, ensuring a particle-free, highly reliable, and long-lasting performance. Their multi-stage design enables operation against atmospheric pressure.
  • multi_stage_roots_vacuum_pump_acp_90

    Flexible and reliable multi-stage Roots vacuum pumps

    ACP
  • Multi-stage Roots pump A 100 L

    Compact multi-stage Roots vacuum pumps

    A 100/200 L
  • a4_series

    Energy-efficient dry multi-stage Roots pumps

    A4
  • multi_stage_roots_vacuum_pumps_torri_bd_2

    Energy-efficient multi-stage Roots pumps

    TORRI
    • multi_stage_roots_vacuum_pump_acp_90

      Flexible and reliable multi-stage Roots vacuum pumps

      ACP
    • Multi-stage Roots pump A 100 L

      Compact multi-stage Roots vacuum pumps

      A 100/200 L
    • a4_series

      Energy-efficient dry multi-stage Roots pumps

      A4
    • multi_stage_roots_vacuum_pumps_torri_bd_2

      Energy-efficient multi-stage Roots pumps

      TORRI

Multi-stage Roots vacuum pumps

Our multi-stage Roots vacuum pumps operate without lubricants or sealing materials, ensuring a particle-free, highly reliable, and long-lasting performance. Their multi-stage design enables operation against atmospheric pressure.
  • multi_stage_roots_vacuum_pump_acp_90

    Flexible and reliable multi-stage Roots vacuum pumps

    ACP
  • Multi-stage Roots pump A 100 L

    Compact multi-stage Roots vacuum pumps

    A 100/200 L
  • a4_series

    Energy-efficient dry multi-stage Roots pumps

    A4
  • multi_stage_roots_vacuum_pumps_torri_bd_2

    Energy-efficient multi-stage Roots pumps

    TORRI
    • multi_stage_roots_vacuum_pump_acp_90

      Flexible and reliable multi-stage Roots vacuum pumps

      ACP
    • Multi-stage Roots pump A 100 L

      Compact multi-stage Roots vacuum pumps

      A 100/200 L
    • a4_series

      Energy-efficient dry multi-stage Roots pumps

      A4
    • multi_stage_roots_vacuum_pumps_torri_bd_2

      Energy-efficient multi-stage Roots pumps

      TORRI

Rotary vane vacuum pumps

Rotary vane vacuum pumps are positive displacement pumps, delivering reliable vacuum generation across a wide range of applications. Pfeiffer offers high-performance models known for their durability and long service life.
  • rotary_vane_pump_smartvane_1

    Single-stage oil-lubricated rotary vane vacuum pumps

    SmartVane
  • rotary_vane_pump_duovane_1

    Two-stage oil-lubricated rotary vane vacuum pumps

    DuoVane
    • rotary_vane_pump_smartvane_1

      Single-stage oil-lubricated rotary vane vacuum pumps

      SmartVane
    • rotary_vane_pump_duovane_1

      Two-stage oil-lubricated rotary vane vacuum pumps

      DuoVane

Rotary vane vacuum pumps

Rotary vane vacuum pumps are positive displacement pumps, delivering reliable vacuum generation across a wide range of applications. Pfeiffer offers high-performance models known for their durability and long service life.
  • rotary_vane_pump_smartvane_1

    Single-stage oil-lubricated rotary vane vacuum pumps

    SmartVane
  • rotary_vane_pump_duovane_1

    Two-stage oil-lubricated rotary vane vacuum pumps

    DuoVane
    • rotary_vane_pump_smartvane_1

      Single-stage oil-lubricated rotary vane vacuum pumps

      SmartVane
    • rotary_vane_pump_duovane_1

      Two-stage oil-lubricated rotary vane vacuum pumps

      DuoVane

Screw vacuum pumps

Screw vacuum pumps combine high pumping speed with a robust, oil-free design, making them ideal for a wide range of industrial applications – from metallurgy to freeze-drying. They are effective, reliable, and deliver consistently high performance.

Screw vacuum pumps

Screw vacuum pumps combine high pumping speed with a robust, oil-free design, making them ideal for a wide range of industrial applications – from metallurgy to freeze-drying. They are effective, reliable, and deliver consistently high performance.

Scroll vacuum pumps

Scroll vacuum pumps deliver high performance with low noise levels, making them ideal for laboratories, semiconductor manufacturing, and vacuum drying. Their oil-free design ensures clean operation and high efficiency.

Scroll vacuum pumps

Scroll vacuum pumps deliver high performance with low noise levels, making them ideal for laboratories, semiconductor manufacturing, and vacuum drying. Their oil-free design ensures clean operation and high efficiency.