Reliable and Robust Isolation Valves

Discover the selection of isolation valves: We give you a comprehensive insight into how to find the ideal solution for your process.

High vacuum valves

Angle valves, gate valves and ball valves at a glance

Angle valves divert the gas flow by 90°, while inline valves, with opposite connecting flanges, allow easy installation in straight pipelines. Both variants usually use a bellows as a seal.

Gate valves and isolation pendulum valves are perfect for confined spaces, and ensure unobstructed gas flow with optically free passage. They are designed for high and ultra-high vacuum and often open at low differential pressures of 30 mbar. Ideal choice for airlocks or upstream of pumps.

Ball valves can also be used in certain high vacuum applications. Cost-optimized KF designs show leakage rates of 10-6 mbar l/s and are temperature resistant up to 80 °C. Special designs are suitable for the HV range and withstand temperatures up to 150 °C.

The choice of the right valve depends on factors such as the process sequence, the process temperature, the ultimate vacuum and the gas composition. In the following sections, we give you an overview of our valve types, seals, sealing mechanisms and drive types. At Pfeiffer Vacuum, you will find the right valve solution for your vacuum range.

Brochure: Isolation Vacuum Valves

Actuator types

  • Manual valves with handwheel or quick-closing/quick-opening
    Temperature resistant up to 150 °C. No restrictions due to electronic components.

Manual valves
  • Pneumatically actuated valves
    Require oil-free compressed air supply. Various versions available.

Pneumatic valves
  • Electropneumatic actuators
    Pneumatically actuated valve with built in solenoid to control the compressed air line feeding into the valve.

Electropneumatic valves

Seals and sealing mechanisms

Seals and sealing methods play a decisive role in the selection of the right valve for the vacuum system.

  • Elastomer seals: O-rings used to seal the valve to withstand leak rates in the high vacuum range. Suitable for different temperatures depending on actuation type and elastomer.

  • Metal seals: Do not require elastomers and are therefore UHV-compatible (10-12 mbar) and heat-resistant up to 300 °C.