Intelligent
State-of-the-art communication protocols adapted to process requirements
Compact
Easy integration on tools or in sub-floor areas thanks to adjustable inlet position
High performance
Low ultimate pressure, high throughput
Technical specifications
Markets & applications
Analytics and R&D
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Photonics Research
Automotive and transport
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Leak Detection and EoL Testing
Electric power generation
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Green Energy Generation
Hydrogen
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Leak Detection and EoL Testing (Master)
Lithium-ion battery production
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Leak Detection and EoL Testing (Master)
Refridgeration
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Leak Detection and EoL Testing
Semiconductor applications
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Inspection & Metrology
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Lithography
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Load Lock & Transfer