High performance
Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput
Compact
Fit-in-place design, directly mounted canned motor
Technical specifications
Markets & applications
Semiconductor applications
-
Metal & high K etch
-
LPCVD / Diffusion
-
ALD
-
PECVD
-
Si Poly etch
Accessories
- Tantal coating for harsh applications