Flexible
Customizable design to match specific process requirements
Easy servicing
Service-relevant access only on front side, disassembly in less than a minute, low total cost of ownership thanks to fewer wearing parts
Efficient
Electrically heated waste gas treatment system with integrated wet scrubber, increases the combustion temperature via hydrogen injection to destroy PFC and other gases
Technical specifications
Markets & applications
Semiconductor applications
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LPCVD / Diffusion
-
Oxyde Etch
-
PECVD
Accessories
- Heating jacket
- N₂-heating for waste gas inlet
- Fan kit for gas exhaust