Robust
Capturing of water soluble gases and particles
Easy servicing
Quick and easy maintenance, service-relevant access only on front side
Efficient
Low operating costs thanks to minimal fresh water consumption, up to 99% uptime
Technical specifications
Markets & applications
Metallurgy
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Vacuum Sintering
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Vacuum Brazing / Soldering
Semiconductor applications
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Metal & high K etch
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Stripping / Ashing
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Si Poly etch
Solar power industry
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Cell Manufacturing
Accessories
- Heating jacket for waste gas inlet
- N₂-heating for waste gas inlet
- Inlet cleaning device
- Fan kit for gas exhaust