Reliable
Best-in-class hybrid bearing technology, long life cycle, maximum uptime
Quiet
Low noise and vibration levels thanks to patented laser balancing technology
High performance
Best compression ratio for light gases, perfectly suited for high and ultra-high vacuum applications
Technical specifications
Markets & applications
Analytics and R&D
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High Energy Physics
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Ultra-High Vacuum
Semiconductor applications
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PVD
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Inspection & Metrology
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Metal & high K etch
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LPCVD / Diffusion
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Lithography
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Oxyde Etch
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Stripping / Ashing
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ALD
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PECVD
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Si Poly etch
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Load Lock & Transfer
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Light deposition
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Ion Implantation
Accessories
- Electrical adapter
- Mains cable
- Connection cable
- Various fieldbus systems
- Power supply kit and display unit
- Mounting kit
- Safety valve
- Venting accessories
- Power failure venting unit
- Vibration damper