Safe
Permanent chemisorption combined with patented absorber design
Efficient
Low media consumption, optimized lifetime of granulate
Maintenance-free
Extremely low maintenance requirements thanks to no moving parts
Technical specifications
Markets & applications
Pharmaceutical industry
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Laboratory Vacuum
R&D
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Photonics Research
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Central Vacuum
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Laboratory Vacuum
Semiconductor
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LPCVD / Diffusion
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Stripping / Ashing
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PVD
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Si Poly etch
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Ion Implantation
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PECVD
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Metal & high K etch
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Oxyde Etch
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ALD
Accessories
- Electrical chemical sensor
- Spare canister
- Spare bypass canister