User-friendly
Large and rotatable color touch display, integrated tool box and storage space
High performance
Fast start-up, high pumping speed, perfectly suited for demanding applications in clean environments
Flexible
Compact and ergonomic design, easy access to all testing areas
Technical specifications
Markets & applications
Analytics and R&D
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Leak Detection
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High Energy Physics
Automotive and transport
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Leak Detection and EoL Testing
Chemical industry
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Leak Detection
Flat panel display production
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Plasma-enhanced chemical vapor deposition (PECVD)
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Load Lock Chambers
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Physical vapor deposition (PVD)
Hospitals and healthcare facilities
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Leak Testing Of Medical Devices
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Lab Vacuum
Hydrogen
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Leak Detection and EoL Testing (Master)
Lithium-ion battery production
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Leak Detection and EoL Testing (Master)
Pharmaceutical industry
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Leak Detection
Refridgeration
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Leak Detection and EoL Testing
Semiconductor applications
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PVD
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Inspection & Metrology
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Metal & high K etch
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LPCVD / Diffusion
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Lithography
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Oxyde Etch
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High flow applications
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Stripping / Ashing
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ALD
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PECVD
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Cobalt, WCVD, TiN & TDMAT
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Annealing
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Si Poly etch
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Load Lock & Transfer
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Light deposition
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Ion Implantation
Technical gases
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Liquefaction
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Insulation Vacuum
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Gas Transport
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Bottle Filling
Thin film coating
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Lab coating
Accessories
- Sniffer probe with 5 or 10 m hose length
- Helium spray gun
- Remote control
- Bottle holder
- Dust filter