XY-Axis Precision Manipulator

  • XY-Axis Precision Manipulator

Customer value

  • Maximum accuracy and excellent reproducibility
  • Very long service life
  • High reliability
  • Easy, ergonomic operability

Product description

  • Precision cross roller guides
  • Zero-backlash and no slip-stick effect
  • Guidance and drive wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Micrometer screws with big knobs - easy to handle and easy to read
  • Bidirectional scale
  • Maximum x and y travel fully usable simultaneously
  • Connection flange with through holes, traversable flange with threaded holes

X/Y-travel: +/- 12.5 mm

  • Precision cross roller guides
  • Zero-backlash and no slip-stick effect
  • Guidance and drive wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Micrometer screws with big knobs - easy to handle and easy to read
  • Bidirectional scale
  • Maximum x and y travel fully usable simultaneously
  • Connection flange with through holes, traversable flange with threaded holes
  • Bakeout temperature: 230 °C
  • Inner diameter: 38 mm
  • Material: Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized
  • Mounting orientation: Arbitrary
  • Pressure range: 1 · 10-10 hPa to ambient pressure
  • Repeatable precision: < 5 µm
  • Service life: Min. 10.000 cycles at full deflection (bellows easy replace)
  • Tightness: < 1 · 10-11 Pa m³/s
  • Dimension-TIM-RS
Nominal diameter A [mm] B [mm] C [mm] D [mm] Resolution Precision Part number
DN 40 CF 154 270 270 130 5 µm < 5 µm 420MXY040-12

X/Y-travel: +/- 25 mm

  • Bakeout temperature: 230 °C
  • Inner diameter: DN 63: 65 mm, DN 100: 102 mm
  • Material: Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: aluminum anodized
  • Mounting orientation: Arbitrary
  • Pressure range: 1 · 10-10 hPa to ambient pressure
  • Repeatable precision: < 3 µm
  • Service life: Min. 10.000 cycles at full deflection (bellows easy replace)
  • Tightness: < 1 · 10-11 Pa m³/s
  • Dimension-TIM-RS
Nominal diameter A [mm] B [mm] C [mm] D [mm] Resolution Precision Part number
DN 63 CF 204 371 371 184 2 µm < 3 µm 420MXY063-25
DN 100 CF 254 394 406 210 2 µm < 3 µm 420MXY100-25

Note

  • Option: FEM-analysis for custom load

Note

Resolution: DN40 at full motor step; DN63 and DN100 at half motor step
Flange sizes DN16 to DN250 compatible with ISO 3669:2017

Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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