XYZ-Axis Precision Manipulator

  • XYZ-Axis Precision Manipulator
  • Dimension-TIM-RS

Customer value

  • Maximum accuracy and excellent reproducibility
  • Very long service life
  • High reliability
  • Easy, ergonomic operation

Product description

  • Compact design for precise 3-axis manipulation
  • Z-axis: recirculating ball bearing guides and ball screw drive
  • XY-axis: precision cross roller guides
  • Zero-backlash and no slip-stick effect
  • Guidance and drive wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • XY-axis micrometer screws with big knobs - easy to handle and easy to read
  • Brake for z-axis prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes

X/Y-travel: +/- 12.5 mm (circular pattern)

  • Bakeout temperature: 230 °C
  • Inner diameter: 38 mm
  • Material: Bellows: stainless steel 316L, flange and tube: stainless steel 304L, housing: stainless steel 304, XY-unit: aluminum anodized
  • Mounting orientation: Arbitrary
  • Pitch of ball screw drive: 2 mm/rotation
  • Precision: < 5 µm (XY-axis)
  • Pressure range: 1 · 10-10 hPa to ambient pressure
  • Repeatable precision: 5 µm
  • Resolution: 5 µm
  • Service life: Min. 10.000 cycles at full deflection (bellows easy replace)
  • Tightness: < 1 · 10-11 Pa m³/s
Nominal diameter A [mm] B [mm] C [mm] D [mm] E [mm] F [mm] Stroke [mm] X/Y-deflection [mm] Part number
DN 40 CF 210 – 310 400 82 321 63.5 232 100 ± 12.5 420MXYZ040-100
DN 40 CF 210 – 360 450 82 321 63.5 232 150 ± 12.5 420MXYZ040-150
DN 40 CF 225 – 425 515 82 321 63.5 232 200 ± 12.5 420MXYZ040-200
DN 40 CF 250 – 550 640 82 321 63.5 232 300 ± 12.5 420MXYZ040-300
DN 40 CF 280 – 680 770 82 321 63.5 232 400 ± 12.5 420MXYZ040-400

Note

  • Options: custom z-axis travel range, FEM-analysis for custom load

Note

Flange sizes DN16 to DN250 compatible with ISO 3669:2017

Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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