Z-Axis Precision Manipulator Motorized

  • Z-Axis Precision Manipulator Motorized
  • Dimension-TIM-RS

Customer value

  • Maximum accuracy and excellent reproducibility
  • Very long service life
  • High reliability
  • Suitable for process automation

Product description

  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • End switches fully adjustable
  • Fixing brake (currentless closed) prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes

Z-Axis Precision Manipulator Motorized

  • Bakeout temperature with electric parts: 80 °C
  • Bakeout temperature without electric parts: 230 °C
  • Inner diameter: DN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm
  • Material: Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
  • Motor type: 2-ph stepping motor
  • Mounting orientation: Arbitrary
  • Pitch of ball screw drive: 2 mm/rotation
  • Power consumption: Motor: 4.8 V DC; max. 2.8 A/phase bipolar parallel; brake: 24 V DC, 0.5 A
  • Pressure range: 1 · 10-10 hPa to ambient pressure
  • Repeatable precision: 1.25 µm (at 1/8 motor step)
  • Resolution: 1.25 µm (at 1/8 motor step)
  • Service life: Min. 10.000 cycles at full deflection (bellows easy replace)
  • Tightness: < 1 · 10-11 Pa m³/s
Nominal diameter A [mm] B [mm] C [mm] D [mm] E [mm] F [mm] Stroke [mm] Part number
DN 40 CF 150 – 250 310 84 251 50 104 100 420MZA040-100-m
DN 40 CF 150 – 300 360 84 251 50 104 150 420MZA040-150-m
DN 40 CF 165 – 365 425 84 251 50 104 200 420MZA040-200-m
DN 40 CF 190 – 490 550 84 251 50 104 300 420MZA040-300-m
DN 40 CF 220 – 620 680 84 251 50 104 400 420MZA040-400-m
DN 63 CF 150 – 250 310 128 293 70 104 100 420MZA063-100-m
DN 63 CF 150 – 300 360 128 293 70 104 150 420MZA063-150-m
DN 63 CF 165 – 365 425 128 293 70 104 200 420MZA063-200-m
DN 63 CF 190 – 490 550 128 293 70 104 300 420MZA063-300-m
DN 63 CF 220 – 620 680 128 293 70 104 400 420MZA063-400-m
DN 100 CF 190 – 290 350 176 343 91 126 100 420MZA100-100-m
DN 100 CF 190 – 340 400 176 343 91 126 150 420MZA100-150-m
DN 100 CF 190 – 390 450 176 343 91 126 200 420MZA100-200-m
DN 100 CF 190 – 490 550 176 343 91 126 300 420MZA100-300-m
DN 100 CF 212 – 612 672 176 343 91 126 400 420MZA100-400-m

Note

  • Options: custom travel range, FEM-analysis for custom load, external bellows guidance

Note

Flange sizes DN16 to DN250 compatible with ISO 3669:2017
If necessary provide internal or external bellows guidance (see datasheet). Optional external bellows guidance ex factory with extra charge (backfitting not possible).

Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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