Z-Axis Precision Manipulator

  • Z-Axis Precision Manipulator
  • Dimension-TIM-RS

Customer value

  • Maximum accuracy and excellent reproducibility
  • Very long service life
  • High reliability
  • Easy, ergonomic operation

Product description

  • Recirculating ball guidance system and recirculating ball screw drive
  • Zero-backlash and no slip-stick effect
  • Guidance and drive are wear-free and maintenance-free
  • Extremely stable design concept minimizes position offset due to pressure changes
  • Fixing brake prevents independent movement
  • Connection flange with through holes, traversable flange with threaded holes
  • Adjustable zero set point

Z-Axis Precision Manipulator

  • Bakeout temperature: 230 °C
  • Inner diameter: DN 40: 38 mm; DN 63: 65 mm; DN 100: 102 mm
  • Material: Stainless steel (bellows: 316L, flange and tube: 304L, housing: 304)
  • Mounting orientation: Arbitrary
  • Pitch of ball screw drive: 2 mm/rotation
  • Pressure range: 1 · 10-10 hPa to ambient pressure
  • Repeatable precision: 5 µm
  • Resolution: 5 µm
  • Service life: Min. 10.000 cycles at full deflection (bellows easy replace)
  • Tightness: < 1 · 10-11 Pa m³/s
Nominal diameter A [mm] B [mm] C [mm] D [mm] E [mm] F [mm] Stroke [mm] Part number
DN 40 CF 150 – 250 370 84 175 50 82 100 420MZA040-100
DN 40 CF 150 – 300 420 84 175 50 82 150 420MZA040-150
DN 40 CF 165 – 365 485 84 175 50 82 200 420MZA040-200
DN 40 CF 190 – 490 610 84 175 50 82 300 420MZA040-300
DN 40 CF 220 – 620 740 84 175 50 82 400 420MZA040-400
DN 63 CF 150 – 250 370 128 217 70 82 100 420MZA063-100
DN 63 CF 150 – 300 420 128 217 70 82 150 420MZA063-150
DN 63 CF 165 – 365 485 128 217 70 82 200 420MZA063-200
DN 63 CF 190 – 490 610 128 217 70 82 300 420MZA063-300
DN 63 CF 220 – 620 740 128 217 70 82 400 420MZA063-400
DN 100 CF 190 – 290 410 176 267 91 104 100 420MZA100-100
DN 100 CF 190 – 340 460 176 267 91 104 150 420MZA100-150
DN 100 CF 190 – 390 510 176 267 91 104 200 420MZA100-200
DN 100 CF 190 – 490 610 176 267 91 104 300 420MZA100-300
DN 100 CF 212 – 612 732 176 267 91 104 400 420MZA100-400

Note

  • Options: custom travel range, FEM-analysis for custom load, external bellows guidance

Note

Flange sizes DN16 to DN250 compatible with ISO 3669:2017
If necessary provide internal or external bellows guidance (see datasheet). Optional external bellows guidance ex factory with extra charge (backfitting not possible).

Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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