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F5, perfluoropolyether, 20 l
Order number: PK 001 854 -T

  • High- quality perfluoropolyether operating fluid for pumping down oxygen, ozone, halogens, organic and inorganic solvents, HCL, BF3, HF, PO3 and fluorine
  • Used for high operating temperatures up to max. 120 °C
  • For pumps with a pumping speed > 20 m3/h
  • Extremely low vapor pressure, achievable ultimate pressure < 1 · 10-3 hPa
Achievable final pressure < 1 · 10-3 hPa | < 7.5 · 10-4 Torr | < 1 · 10-3 mbar
Operating fluid amount 20 l
Operating fluid attributes For operation of the pump in 50 and 60 Hz mains
Pumping of highly corrosive gases
Pumping of gases with >21 % oxygen content
Oxidation-resistant
Resistant against acids and organic vapors
Plasma etching compatible
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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