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F5, perfluoropolyether, 20 l
Order number: PK 001 854 -T

  • High- quality perfluoropolyether operating fluid for pumping down oxygen, ozone, halogens, organic and inorganic solvents, HCL, BF3, HF, PO3 and fluorine
  • Used for high operating temperatures up to max. 120 °C
  • For pumps with a pumping speed > 20 m3/h
  • Extremely low vapor pressure, achievable ultimate pressure < 1 · 10-3 hPa
Achievable ultimate pressure < 1 · 10-3 hPa | < 7.5 · 10-4 Torr | < 1 · 10-3 mbar
Attributes Pumping of gases with >21 % ogygen
Oxidation resistivity
Plasma etching compatible
Acid and organic vapor resistivity
For operation of the pump in 50 and 60 Hz mains supply
Pumping of highly corrosive gases
Operating fluid filling 20 l
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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