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F4, perfluoropolyether, 0.5 l
Order number: PK 005 886 -T

  • High- quality perfluoropolyether operating fluid for pumping down oxygen, ozone, halogens, organic and inorganic solvents, HCL, BF3, HF, PO3 and fluorine
  • Used for high operating temperatures up to max. 120 °C
  • For pumping speeds < 20 m3/h
  • Extremely low vapor pressure, achievable final pressure < 1 · 10-3 hPa
Achievable final pressure < 1 · 10-3 hPa | < 7.5 · 10-4 Torr | < 1 · 10-3 mbar
Operating fluid attributes For operation of the pump in 50 and 60 Hz mains
Pumping of highly corrosive gases
Resistant against acids and organic vapors
Plasma etching compatible
Pumping of gases with >21 % oxygen content
Oxidation-resistant
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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