Clean
Compliance with emission limits for 20 mg/Nm3 particulate matter (TA-Luft)
Safe
Safe disposal of particulate waste thanks to enclosed dust collection bag
Maintenance-free
Automatic cleaning of filter elements during operation without process interruption
Technical specifications
Markets & applications
Semiconductor applications
-
LPCVD / Diffusion
-
Oxyde Etch
-
PECVD
Accessories
- Dust bag
- Filter element