High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing
Efficient
Intelligent variable speed drive, low cost of ownership, minimal maintenance, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, integrated control panel
Technical specifications
Markets & applications
Semiconductor applications
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Oxyde Etch
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Stripping / Ashing
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Cobalt, WCVD, TiN & TDMAT
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Si Poly etch
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Ion Implantation