Easy servicing
Service-relevant access only on front side, disassembly in less than a minute, low total cost of ownership thanks to fewer wearing parts
Flexible
Customizable design to match specific process requirements
Reliable
Most widespread abatement technology with a highly efficient fuel gas burner for a wide range of applications
Technical specifications
Markets & applications
Analytics and R&D
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Laboratory Vacuum
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Photonics Research
Flat panel display production
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Plasma-enhanced chemical vapor deposition (PECVD)
Metallurgy
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Vacuum Sintering
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Vacuum Brazing / Soldering
Pharmaceutical industry
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Laboratory Vacuum
Semiconductor applications
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LPCVD / Diffusion
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Oxyde Etch
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High flow applications
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ALD
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PECVD
Solar power industry
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Cell Manufacturing
Accessories
- Heating jacket for waste gas inlet
- N₂-heating for waste gas inlet
- Mechanical burner cleaning device
- Fan kit for gas exhaust