Flexible
Customizable design to match specific process requirements
Easy servicing
Service-relevant access only on front side, disassembly in less than a minute, low total cost of ownership thanks to fewer wearing parts
Efficient
Electrically heated waste gas treatment system with integrated wet scrubber
Technical specifications
Markets & applications
Semiconductor applications
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LPCVD / Diffusion
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High flow applications
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ALD
Accessories
- Heating jacket for waste gas inlet
- N₂-heating for waste gas inlet
- Fan kit for gas exhaust