Reliable
Best-in-class hybrid bearing technology, long life cycle, maximum uptime
Low magnetic stray field
Ideal for high-sensitivity applications such as high-resolution electron microscopes
Quiet
Low noise and vibration levels thanks to embedded bearing combined with patented laser balancing technology
Technical specifications
Markets & applications
Automotive and transport
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Heat Treatment
Metallurgy
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Vacuum Brazing / Soldering
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Heat Treatment
Semiconductor applications
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PVD
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Inspection & Metrology
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Metal & high K etch
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LPCVD / Diffusion
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Lithography
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Oxyde Etch
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Stripping / Ashing
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ALD
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PECVD
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Si Poly etch
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Load Lock & Transfer
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Light deposition
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Ion Implantation
Accessories
- Electrical adapter
- Mains cable
- Connecting cable
- Various fieldbus systems
- Power supply kit and display unit
- Mounting kit
- Safety valve
- Venting accessories
- Power failure venting unit
- Vibration damper