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HiPace 700 Plus

Turbomolecular vacuum pumps

Or call us directly: +1-800-248-8254

Reliable

Best-in-class hybrid bearing technology, long life cycle, maximum uptime

Low magnetic stray field

Ideal for high-sensitivity applications such as high-resolution electron microscopes

Quiet

Low noise and vibration levels thanks to embedded bearing combined with patented laser balancing technology

Technical specifications

Markets & applications

Automotive and transport
  • Heat Treatment
Metallurgy
  • Vacuum Brazing / Soldering
  • Heat Treatment
Semiconductor applications
  • PVD
  • Inspection & Metrology
  • Metal & high K etch
  • LPCVD / Diffusion
  • Lithography
  • Oxyde Etch
  • Stripping / Ashing
  • ALD
  • PECVD
  • Si Poly etch
  • Load Lock & Transfer
  • Light deposition
  • Ion Implantation

Accessories

  • Electrical adapter
  • Mains cable
  • Connecting cable
  • Various fieldbus systems
  • Power supply kit and display unit
  • Mounting kit
  • Safety valve
  • Venting accessories
  • Power failure venting unit
  • Vibration damper
Shop accessories