Robust
Integrated rotor temperature measurement system, reliable performance throughout complete thermal operating range
Quiet
Low noise and vibration levels thanks to patented laser balancing technology, perfectly suited for vibration-sensitive applications
Flexible
Easy integration even into small analytical systems, lightweight and portable
Technical specifications
Markets & applications
Analytics and R&D
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Laboratory Vacuum
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Cryogenics
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Plasma Physics
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High Energy Physics
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Mass Spectrometry
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Photonics Research
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Ultra-High Vacuum
Automotive and transport
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Leak Detection and EoL Testing
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Space Research
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3D Printing
Electric power generation
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Green Energy Generation
Hospitals and healthcare facilities
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Mass spectromer
Hydrogen
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Leak Detection and EoL Testing (Master)
Lithium-ion battery production
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Leak Detection and EoL Testing (Master)
Metallurgy
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3D Printing
Pharmaceutical industry
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Laboratory Vacuum
Refridgeration
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Leak Detection and EoL Testing
Scientific instruments
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Mass Spectrometry
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Surface Analysis
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Electron Microscopy
Semiconductor applications
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PVD
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Inspection & Metrology
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Metal & high K etch
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LPCVD / Diffusion
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Lithography
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Oxyde Etch
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Stripping / Ashing
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ALD
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PECVD
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Si Poly etch
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Load Lock & Transfer
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Light deposition
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Ion Implantation
Technical gases
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Bottle Filling
Thin film coating
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Decorative Coating
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Lab coating
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Wear Protection Coating
Accessories
- Electrical adapter
- Mains cable
- Connecting cable
- CIP adapter
- Power supply kit and display unit
- Pressure sensor
- Mounting kit
- Safety valve
- Venting accessories
- Power failure venting unit
- Vibration damper