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HiPace 800

Turbomolecular vacuum pumps

Or call us directly: +1 800 248 8254

Reliable

Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle

High gas throughput

High pumping speed, compatible with a variety of backing pumps, high compression for light gases

High performance

Optimized rotor geometry, enhanced gas load handling

Technical specifications

Markets & applications

Analytics and R&D
  • Laboratory Vacuum
  • Plasma Physics
  • High Energy Physics
  • Space Research
  • Ultra-High Vacuum
Automotive and transport
  • Space Research
Pharmaceutical industry
  • Laboratory Vacuum
Semiconductor applications
  • PVD
  • Inspection & Metrology
  • Metal & high K etch
  • LPCVD / Diffusion
  • Lithography
  • Oxyde Etch
  • Stripping / Ashing
  • ALD
  • PECVD
  • Si Poly etch
  • Load Lock & Transfer
  • Light deposition
  • Ion Implantation
Technical gases
  • Bottle Filling

Accessories

  • Electrical adapter
  • Mains cable
  • Connecting cable
  • Various fieldbus systems
  • Power supply kit and display unit
  • Mounting kit
  • Safety valve
  • Venting accessories
  • Power failure venting unit
  • Vibration damper