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TORRI BD 0100–0600 A

Multi-stage Roots vacuum pumps

Or call us directly: +1-800-248-8254

Flexible

Shortest pump-down time for load lock chambers

Efficient

Extremely low energy consumption, minimal maintenance, high uptime

Compact

Exceptionally small and light-weight

Technical specifications

Markets & applications

Analytics and R&D
  • Photonics Research
Semiconductor applications
  • PVD
  • Inspection & Metrology
  • Lithography
  • Annealing
  • Load Lock & Transfer
  • Ion Implantation
Thin film coating
  • Lab coating