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  7. ATH 1603 M，DN 200 ISO-F，带集成驱动电子装置，水冷，非加热

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Y2562100
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ATH 1603 M，DN 200 ISO-F，带集成驱动电子装置，水冷，非加热
订单号: Y2562100

  • Holweck 级 5 轴磁悬浮涡轮泵适合用于 N2的直至 1360 l/s 的吸气能力
  • 连接法兰 DN 200 ISO-F
  • 使用外部 Magpower 电子驱动单元操作
  • 用于在所有情况下的安装
  • 水冷，不加热
  • 带有CE标志且符合 RoHS 标准
Ambient temperature 5 – 45 摄氏度
Bakeout temperature 最大值120 摄氏度
Bearing 磁铁
Compression ratio for Ar > 1 · 108
Compression ratio for H2 > 5 · 102
Compression ratio for He > 4 · 104
Compression ratio for N2 > 1 · 108
Connection flange (in) DN 200 ISO-F
Connection flange (out) DN 40 ISO-KF
Cooling method 水
Cooling water flow 60 l/h
Cooling water flow, max. 60 l/h
Cooling water flow, min. 60 l/h
Cooling water temperature 15 – 25 摄氏度
Final pressure < 6 · 10-9 百帕
Fore-vacuum max. for Ar 2.5 百帕
Fore-vacuum max. for H2 0.3 百帕
Fore-vacuum max. for He 1.2 百帕
Fore-vacuum max. for N2 1.7 百帕
Gas throughput for Ar 20.3 hPa l/s | 15.22 Torr l/s | 20.3 mbar l/s
Gas throughput for H2 > 67.6 hPa l/s | > 50.7 Torr l/s | > 67.6 mbar l/s
Gas throughput for He > 67.6 hPa l/s | > 50.7 Torr l/s | > 67.6 mbar l/s
Gas throughput for N2 67.6 hPa l/s | 50.7 Torr l/s | 67.6 mbar l/s
I/O interfaces 通过外部驱动电子装置
Leakage rate < 5 · 10-8 hPa l/s | < 3.75 · 10-8 Torr l/s | < 5 · 10-8 mbar l/s
Mains connection 200 – 240 (±10%) V AC - 50/60 Hz
Mounting orientation 随意
Operating site 室内，防风雨
Operating voltage: 50/60 Hz 200 – 240 / 200 – 240, 50/60 Hz V AC
Power consumption at final pressure 300 瓦
Power consumption max. 650 瓦
Protection degree IP42
Pumping speed for Ar 1280 l/s
Pumping speed for H2 540 l/s
Pumping speed for He 940 l/s
Pumping speed for N2 1360 l/s
Rotation speed ± 2 % 39,000 rpm | 39,000 min-1
Rotation speed in stand-by mode 15,000-39,000 rpm | 15,000-39,000 min-1
Run-up time < 6 分
Sound power < 48 分贝 (A)
Sound pressure level <48 分贝 (A)
Typical oscillation train (at inlet flange 10-1000 Hz) 0.01 微米
Weight 34 千克

Dimension-TIM-RS

H
320.2 毫米

Characteristic-TIM-RS-1

Characteristic-TIM-RS-2

文件名 类型 语言 日期 文件大小
数据表 PDF ZH 2023-03-29 ~ 666.2 KB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T  +1 (800) 248-8254
F  +1 (888) 658-7983
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