Transmission electron microscopy (TEM) is used in various fields of application such as medical biology, life sciences, materials research, metallurgy and industry. TEM can provide information about the structure and texture of the object under investigation. It can be used in the semiconductor market to analyze the production and fabrication of computer and silicon chips. It is also useful in industrial applications to examine crystals and metals. They examine the manufactured objects to identify defects, fractures and damages in the micro range.

Application requirements

  • Low vibration
  • High reliability
  • Low power consumption

How does it work?
At the top are two electrodes, an anode and a cathode. The anode is positively charged and the cathode negative. As a cathode, a thin wire/filament is used that emits electrons. When a voltage is applied to the Filament, electrons are emitted which are pulled to the anode. The anode is a disc with a little void in the middle through which the electrons can pass. The voltage is between 70kV and 120kV. Thereby the electrons can pass the TEM hitch less, inside the microscope must be a vacuum. Magnetic fields regulate the electron beam inside the TEM. Several coils produce the magnetic fields. The coils also focus the electron beam, so that the high impact is concentrated on the sample. To regulate the intensity of the electron beam, a blind is used. There you can change the luminosity of the passing electrons. After the electrons pass the specimen, the quantity can be reduced with another blind, before they were focused again with additional coils. This is necessary, because some electrons are distracted after they pass the specimen. Afterwards the electrons pass the projection lenses. There the electron beam will be expanded, so that the specimen can be imaged sharper.

Product portfolio
Because of the low vibration level required, the HiPace Plus line from Pfeiffer Vacuum is the best solution for electron microscopes. The vibration level of the HiPace Plus is significantly lower than that of standard turbopumps. Pfeiffer Vacuum can also offer you a specially developed vibration isolator to reduce the vibration level even further. For a backing pump we can offer various dry solutions. You can choose between our dry membrane pumps, multi-stage Roots pumps or even our newly developed scroll pumps. We can also offer different gauges in order to provide you with a customized vacuum solution.

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