Range of vacuum and abatement solutions
Pfeiffer debuted several standout exhibits that attracted the interest of attendees from across the industry.The UltiDry P1820 multi-stage Roots vacuum pump was a central feature at the booth. Designed for optimal efficiency and reliability, the UltiDry is tailored to meet the high standards of the semiconductor industry. The vacuum pump was supported by a holographic display that vividly illustrated its energy-saving performance in demanding semiconductor applications. The spinning LED hologram also showcased an animated UltiDry mascot, which captured the attention of hundreds of visitors. The eye-catching display became a hit on the show floor, with many attendees stopping to film and photograph the character in action.
Complementing the technology on display was a 3D-printed semiconductor fab, a detailed and interactive scale model of an entire semiconductor manufacturing facility – from the clean room to the sub-fab. The physical model served as a hands-on educational tool that displays how a semiconductor fab is structured and how it operates. Visitors could closely examine each stage of the production process, allowing them to see clearly where and how vacuum and abatement technologies from the Busch Group are integrated throughout the facility.
Also on display was a full-size mock-up of the CT-TW-H thermal-wet hybrid gas abatement system from Pfeiffer. This system was highlighted for its hydrogen-injected combustion technology – an effective method for selectively destroying exhaust gases, particularly perfluorocarbons (PFCs). The system delivers high uptime, robust environmental performance, and easy maintenance, all of which are critical for sustainable semiconductor manufacturing.
At the Pfeiffer booth, sales and technical experts from the entire Busch Group were on hand to provide tailored consultations and discuss solutions to specific production challenges. The overwhelmingly positive feedback received during the show reaffirms the dedication of the group to driving forward-looking innovation in semiconductor manufacturing.