Dry Screw Vacuum Pumps for Semiconductor Manufacturing

Engineered for the most demanding processes in semiconductor manufacturing, including microchip production, silicon wafer coating, and etching.

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Advanced vacuum technology for the semiconductor industry

The operating principle of COBRA Semicon vacuum pumps is based on our state-of-the-art screw technology. With their patented self-balancing screws, they set new standards in terms of efficiency and reliability for semiconductor manufacturing.

COBRA Semicon vacuum pumps combine large throughputs with high vapor and particle tolerance. Particle-laden media can therefore be evacuated without any problems. The oil- and contact-free operating principle ensures low maintenance requirements, low operating costs and a long life cycle.

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COBRA BC 1001 G

Types of dry screw vacuum pumps

In addition to the various processes in semiconductor manufacturing, COBRA Semicon dry screw vacuum pumps are also the ideal choice for applications in the production of photovoltaic cells, flat panel display production, and numerous coating applications.

Product series

Nominal pumping speed

Type

COBRA BC

100 m3/h - 1,580 m3/h

Semicon

COBRA DS

70 m3/h - 6,000 m3/h

Semicon

Discover our COBRA Semicon series

COBRA BC

The ideal solution for light to medium semiconductor applications

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COBRA DS

The new generation of dry vacuum pumps for harsh semiconductor processes

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COBRA BC

The ideal solution for light to medium semiconductor applications

  • Advanced screw design

  • Dry and contact-free operating principle

  • Unique “flying bearing” design

  • Cantilever construction

  • Compact fit-in-place design

  • Direct water cooling

  • Fully open communication protocol

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COBRA 0101 BC G

COBRA DS

The new generation of dry vacuum pumps for harsh semiconductor processes

  • Advanced screw design

  • Dry and contact-free operating principle

  • Excellent powder handling

  • Effective indirect water cooling

  • Compact fit-in-place design

  • High pumping speed for the discharge of hydrogen

  • High-efficiency motor

  • Sizes with integrated vacuum booster available

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COBRA DS 1200 A

Semiconductor applications

Semiconductor manufacturing requires both a contamination-free environment and high vacuum levels. Our COBRA Semicon dry screw vacuum pumps meet these requirements. Contact our experts to find the perfect vacuum solution for you.

Find out more about how dry screw vacuum technology is used in different semiconductor applications:

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Seeking dry screw vacuum pumps for other applications?

Explore the COBRA Industry from Busch Vacuum Solutions!

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