- Advanced screw design
- Dry and contact-free operating principle
- Unique “flying bearing” design
- Cantilever construction
- Compact fit-in-place design
- Direct water cooling
- Fully open communication protocol
COBRA Semicon
Dry screw vacuum pumps
The operating principle of COBRA Semicon vacuum pumps is based on our state-of-the-art screw technology. With their patented self-balancing screws, they set new standards in terms of efficiency and reliability for semiconductor manufacturing.
COBRA Semicon vacuum pumps combine large throughputs with high vapor and particle tolerance. Particle-laden media can, therefore, be evacuated without any problems. The oil-and contact-free operating principle ensures low maintenance requirements, low operating costs, and a long life cycle.
Discover our COBRA Semicon series
COBRA BC
The ideal solution for light to medium semiconductor applications
Benefits of the COBRA BC series
COBRA BC dry screw vacuum pumps are perfectly suited for tasks in semiconductor manufacturing, particularly in load lock and transfer chambers. Further applications are metrology, lithography, physical vapor deposition (PVD), rapid thermal annealing (RTA) and silicon etching.
The patented self-balancing screw design ensures lowest vibration levels and quiet operation.
The screw rotors of COBRA BC vacuum pumps are manufactured from a single-piece casting, avoiding any gaps. This makes an ingress of process fluids or particles impossible. Thus, corrosion and deposition are prevented.
COBRA BC vacuum pumps feature a bell-shaped cantilever construction: The twin rotor with variable pitch screws is mounted only on the motor side. Thanks to the unique “flying bearing” design, inlet bearings are unnecessary. Therefore, the pumped medium does not come in contact with the bearings. This ensures clean vacuum generation and allows the pumped medium to be fully recovered.
COBRA BC series vacuum pumps use efficient direct water cooling. An even temperature distribution throughout the pump body is therefore maintained. Moreover, thermal stability during the process is ensured.
The fully open communication protocol (Modbus TCP-IP) enables control of all functionalities. This includes idle modes and a variable speed drive. The communication protocol can easily be adapted to a specific network protocol using standard interface components.
A directly mounted, canned motor makes the dimensions of the COBRA BC series very compact. Due to their fit-in-place design, they can be easily and quickly retrofitted to existing systems.
COBRA DS
The new generation of dry vacuum pumps for harsh semiconductor processes
- Advanced screw design
- Dry and contact-free operating principle
- Excellent powder handling
- Effective indirect water cooling
- Compact fit-in-place design
- High pumping speed for the discharge of hydrogen
- High-efficiency motor
- Sizes with integrated vacuum booster available
Benefits of the COBRA DS series
COBRA DS dry screw vacuum pumps are the ideal vacuum generators for demanding semiconductor applications, particularly where high hydrogen throughput is required. They are therefore perfectly suited for chemical vapor deposition (CVD), rapid thermal processing (RTP) or atomic layer deposition (ALD).
Various sizes of the COBRA DS series feature an integrated high-performance vacuum booster. This combination of backing pump and vacuum booster achieves increased pumping speeds and ultimate pressures.
The self-balancing screw design of the vacuum pump is a patented innovation. This feature ensures excellent powder handling and high uptime.
The screw rotors of COBRA DS vacuum pumps are manufactured from a single-piece casting, avoiding any gaps. This makes an ingress of process fluids or particles impossible. Thus, corrosion and deposition are prevented.
COBRA DS series vacuum pumps use effective, indirect water cooling. As a result, the temperature distribution throughout the pump body can be controlled. A response to process variations is possible at any time.
Due to their fit-in-place design, COBRA DS can be easily and quickly retrofitted to existing systems.
