- Maintenance-free thanks to magnetic bearings
- Minimal wear
- Reduced operating costs
- Oil-free operation
- Low noise and vibration levels
- Compact design
ATH-M / ATP-M
Turbomolecular vacuum pumps
ATH-M and ATP-M turbomolecular vacuum pumps use a 5-axis magnetic bearing system to generate high, ultra-high, and even extremely high vacuum levels of down to 10⁻¹¹ hPa (mbar).
Designed for demanding applications in Semiconductor manufacturing, industrial applications and R&D, the operating principle of these vacuum pumps uses high-speed rotors to ensure high pumping speed with minimal vibration.
ATH-M / ATP-M
Maintenance-free turbopumps with magnetic bearings
Benefits of the ATH-M / ATP-M series
The magnetic bearing technology in the ATH-M and ATP-M series utilizes electromagnetism and an elaborate electronic control system to keep the rotor in suspension and enable rotation without physical contact with the pump housing. This eliminates friction, preventing wear and making these turbopumps maintenance-free.
The minimized mechanical friction also results in low noise and vibration levels. This makes ATH-M and ATP-M turbopumps ideal for vibration-sensitive applications in semiconductor manufacturing processes.
Additionally, in the event of a power failure, the magnetic bearings are supplied with electricity generated by the rotational energy of the pump. This enables power failures to be easily bridged for several minutes.
The rotors of our turbomolecular vacuum pumps are driven by frequency-controlled direct current (DC) motors. They can regulate the rotational speed of the rotors to match the desired vacuum level, helping to save energy and costs. In the latest generation of ATH-M and ATP-M pumps, the drive unit is integrated into the pump, ensuring a small footprint.
Some ATH-M turbopumps are equipped with an integrated heating system, helping to maintain pump performance under demanding chemical conditions. This feature is particularly beneficial in applications such as chemical vapor deposition (CVD), where chemical reactions can produce by-products that tend to condense inside the vacuum system. The integrated heating keeps the pump at a consistently elevated temperature, reducing the risk of condensation and buildup of residues.
