Vacuum Technology Book, Volume II

1.3.1 Contamination

Vacuum chambers must be clean in order to reach the desired pressure as quickly as possible when they are pumped down. Typical contaminants of vacuum systems include

  • Residues from the production of the vacuum systems Oil and grease on surfaces, screws and seals
  • Application-related contaminants Process reaction products, dust and particles
  • Ambient-related contaminants Condensed vapors, particularly water that is adsorbed on the walls of the vessel.

Consequently, it is necessary to ensure that the components are as clean as possible when installing vacuum equipment. All components attached in the vacuum chamber must be clean and grease-free. All seals must also be installed dry. If the use of vacuum grease cannot be avoided, it must be used extremely sparingly, if at all, to aid installation but not as a sealant. If high or ultra-high vacuum is to be generated, clean lint-free and powder-free gloves must be worn during the assembly process.

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