3.1 General

A vacuum system includes a variety of different components, such as chambers, pumps, measurement instruments, components, valves, feedthroughs, manipulators, etc., that must be joined together to form a unit. A distinction is made between detachable connections, which are equipped with seals, and non-detachable connections. The following sections describe the materials used in vacuum technology, the different types of connections and the mechanical components. It shows what to look out for during the design and the selection.