Pfeiffer Vacuum

4.6.6 Portfolio overview

4.6.6.1 Water cooled process pumps

The pumping speed and final pressure of the ACP 120 / ACP 120 G can be increased further increased by combining them with a Roots pumps. Optimized pump versions are available for larger volumes.

The technical data provided are given for a mains frequency of 50 Hz. Standard not more than 1 m3. Special versions of A 203 H and A 1803 H type pumps are suitable for volumes of up to 50 m3.

Multi-stage Roots pumps for noncorrosive applications
Model Pumping speed Ultimate pressure with/without purge gas Applications
ACP 120 95 m³ · h-1 3 · 10-2 hPa Load locks and transfer chambers with a volume of up to 1 m3, noncorrosive gases, noble gases, regeneration of cryo pumps, backing pumps for turbopumps with noncorrosive gases
ACP 120 G 95 m³ · h-1 9 · 10-2 with 35 slm purge gas
A100 L 100 m³ · h-1 6.6 · 10-3 hPa
A100 L ES 100 m³ · h-1 7 · 10-4 hPa

Table 4.16: Performance data for water cooled multi-stage Roots pumps for noncorrosive applications

Multi-stage Roots pumps for corrosive applications
Model Pumping speed Ultimate pressure with/without purge gas Applications
A 103 P 120 m³ · h-1 6.5 · 10-3 hPa 2.6 · 10-2 hPa mit 20 slm Spülgas Dry etching (oxide and poly) Ashing Stripping RTP Implantation
A 603 P 480 m³ · h-1 5 · 10-4 hPa 2 · 10-3 hPa with 20 slm purge gas
A 1003 P 900 m³ · h-1 3 · 10-4 hPa 1 · 10-3 hPa mit 20 slm Spülgas

Table 4.17:Performance data for P series water cooled multi-stage Roots pumps for corrosive applications

Multi-stage Roots pumps for corrosive applications (harsh processes)
Model Pumping speed Ultimate pressure with/without purge gas Applications
A 203 H 130 m³ · h-1 6 · 10-2 hPa 5 · 10-1 with 50 slm purge gas Metal etching CVD (PECVD, SACVD, LPCVD) ALD Epitaxy Dry etching
A 803 H 600 m³ · h-1 1 · 10-3 hPa 1 · 10-2 hPa with 50 slm purge gas
A 1503 H 1,100 m³ · h-1 2 · 10-3 hPa 9 · 10-3 hPa with 50 slm purge gas
A 1803 H 1,650 m³ · h-1 2 · 10-3 hPa 9 · 10-3 hPa with 50 slm purge gas
AD 73 KH 4,700 m³ · h-1 8 · 10-4 hPa 3 · 10-3 hPa with 50 slm purge gas

Table 4.18: Performance data for H series water cooled multi-stage Roots pumps for corrosive applications (harsh processes)

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