Pfeiffer Vacuum

4.2.3.2 Two-stage rotary vane vacuum pumps

Two-stage rotary vane pumps are suitable for applications in the low and medium vacuum ranges down to a pressure of 10-3 hPa. An integrated gas ballast feed allows condensable vapors to be pumped down.

PentaLine

The pumps in the PentaLine series are characterized by their innovative drive concept. These pumps are powered by an electronically controlled brushless DC motor whose rotor sits directly on the rotor shaft of the pumping system. The pumps are supplied with alternating current via an electronic converter. The two voltage ranges of 100 – 120 volts and 200 – 240 volts can be selected with a selector switch. Their advantages include high energy efficiency with approximately 25 % to 50 % lower energy consumption than conventional rotary vane pumps, and the pump’s hermetic seal without a shaft feedthrough. If maximum pump performance is temporarily not required, the RPM of the pump can be reduced to standby mode for additional energy savings of 50 %. Thanks to this new drive concept, it is possible to avoid the high startup currents that typically occur when the pump is cold, even with asynchronous motors. In addition to the above-mentioned gas ballast feed, the PentaLine pumps can be operated with temperature control to increase the water vapor tolerance. The functions Pump ON, Standby ON and Enhanced Water Vapor Tolerance ON can be selected with a PLC-compatible interface or a remote connection.

DuoLine

DuoLine rotary vane vacuum pumps are powered by AC or DC motors, depending upon the size of the pump. In addition to the standard models, the following designs are also available: Magnetically coupled pumps (Duo M series) and corrosive gas pumps, both with and without magnetic coupling (Duo MC series).

Duo M series

M series pumps are equipped with a magnetic coupling with a hermetic sealing. This wear-free sealing concept hermetically seals the pumps, making them clean and environmentally friendly. The magnetic coupling minimizes maintenance resulting in significant savings.

PentaLine
Model Pumping speed Ultimate pressure Applications
Penta 20 22 m³ · h-1 3 · 10-3 hPa Ideally suited for turbopump pumping stations, analysis, industrial applications, research and development, coating
Penta 35 34 m³ · h-1 3 · 10-3 hPa

Table 4.3: PentaLine performance data

DuoLine
Model Pumping speed Ultimate pressure Applications
DUO 1,6 1.25 m³ · h-1 3 · 10-3 hPa Turbopump pumping stations, analysis, research and development, coating
DUO 3 2.5 m³ · h-1 3 · 10-3 hPa
DUO 6 5 m³ · h-1 3 · 10-3 hPa
DUO 11 9 m³ · h-1 3 · 10-3 hPa
DUO 35 32 m³ · h-1 3 · 10-3 hPa
DUO 65 62 m³ · h-1 2 · 10-3 hPa
DUO 125 115 m³ · h-1 2 · 10-3 hPa
DUO 255 250 m³ · h-1 3 · 10-3 hPa

Table 4.4: DuoLine performance data

Duo M series
Model Pumping speed Ultimate pressure Applications
DUO 1,6 M 1.25 m³ · h-1 3 · 10-3 hPa Turbopump pumping stations, analysis, research & development, coating, non-explosive toxic gases
DUO 3 M 2.5 m³ · h-1 3 · 10-3 hPa
DUO 6 M 5 m³ · h-1 3 · 10-3 hPa
DUO 11 M 9 m³ · h-1 3 · 10-3 hPa
DUO 35 M 32 m³ · h-1 3 · 10-3 hPa
DUO 65 M 62 m³ · h-1 2 · 10-3 hPa
DUO 125 M 115 m³ · h-1 2 . 10-3 hPa
DUO 255 M 250 m³ · h-1 3 · 10-3 hPa

Table 4.5: Duo M series performance data

Duo MC series

The MC series pumps are suitable for corrosive gas applications. In contrast to standard pumps, they have a special gas ballast valve, through which inert gas can be admitted into the pump. In addition, the pumps are equipped with special vanes that are especially resistant to chemicals. All corrosive gas pumps in the MC series are ready for operation with chemical-resistant F4 or F5 (perfluoropolyether) operating fluids. The Duo MC pumps are especially suitable for pumping toxic gases because the hermetically sealed magnetic coupling prevents gas from escaping to the outside.

Pascal

Rotary vane vacuum pumps in the Pascal series in the pumping speed class of between 5 and 21 m3 · h-1 are built with either AC or DC motors. The inlet and outlet flange can be either vertical or horizontal for ideal integration or to enable accessories to be attached. Besides the standard range, the I series with forced lubrication and two different corrosive gas series are also available.

SD series

The SD series of rotary vane vacuum pumps is designed for noncorrosive gases. The natural lubrication (pumping speed class up to 21 m3 · h-1) minimizes the amount of oil discharge from the exhaust. The low pump temperature reduces the oil backflow at the final pressure to a minimum during long-term operation.

As in all other pumps in the pumping speed class up to 21 m³ · h-1 the pump shaft seal is accessible without dismantling the pump block and field maintenance is easy as a result.

I series

Pumps in the I series are equipped with forced lubrication. This enhances their water vapor tolerance in comparison with the SD series. Forced lubrication allows I series pumps to achieve a very low noise level and low vibration.

C1 series

Forced lubrication pumps in the C1 series are particularly suitable for corrosive gas applications due to their

FPM seals and chromium oxide coated shafts and the use of special materials for the housing, vanes, shaft sleeves and sightglasses. The two largest models in this series also have integrated oil filters and oil casing flushing device.

The C1 series is supplied with mineral oil.

Duo MC series
Model Pumping speed Ultimate pressure Applications
DUO 20 MC 20 m³ · h-1 5 · 10-3 hPa Corrosive gas applications, chemical labs, toxic non-explosive gases
DUO 35 MC 32 m³ · h-1 3 · 10-3 hPa
DUO 65 MC 62 m³ · h-1 3 · 10-3 hPa

Table 4.6: Duo MC series performance data

Pascal SD series
Model Pumping speed Ultimate pressure Applications
2005 SD 5 m³ · h-1 2 · 10-3 hPa Industrial applications, analysis, research and development, leak detection
2010 SD 10 m³ · h-1 2 · 10-3 hPa
2015 SD 15 m³ · h-1 2 · 10-3 hPa
2021 SD 21 m³ · h-1 2 · 10-3 hPa
2033 SD 30 m³ · h-1 3 · 10-3 hPa
2063 SD 60 m³ · h-1 3 · 10-3 hPa

Table 4.7: Pascal SD series performance data

Pascal I series
Model Pumping speed Ultimate pressure Applications
2005 I 5 m³ · h-1 2 · 10-3 hPa Analysis, research and development, drying, distillation
2010 I 10 m³ · h-1 2 · 10-3 hPa
2015 I 15 m³ · h-1 2 · 10-3 hPa
2021 I 21 m³ · h-1 2 · 10-3 hPa

Table 4.8: Pascal I series performance data

C2 series

Pumps in the C2 series are also equipped with forced lubrication. The anticorrosive gas equipment of these pumps with bearing lubrication, a neutral gas flushing facility for degassing the operating fluid and the use of special vane materials is superior to the C1 series. The two largest models in this series are also fitted with connections for oil pressure sensors and oil temperature sensors. Armed with this anticorrosive gas equipment, Pascal C2 pumps are particularly suitable for use in etching and coating processes in semiconductor fabrication.

The C2 series is supplied with perfluorinated operating fluids.

Pascal C1 series
Model Pumping speed Ultimate pressure Applications
2005 C1 5 m³ · h-1 2 · 10-3 hPa Corrosive gas application, chemical laboratories, load lock and transfer chamber chemical applications, sterilization
2010 C1 10 m³ · h-1 2 · 10-3 hPa
2015 C1 15 m³ · h-1 2 · 10-3 hPa
2021 C1 21 m³ · h-1 2 · 10-3 hPa
2033 C1 30 m³ · h-1 3 · 10-3 hPa
2063 C1 60 m³ · h-1 3 · 10-3 hPa

Table 4.9: Pascal C1 series performance data

Pascal C2 series
Model Pumping speed Ultimate pressure Applications
2010 C2 10 m³ · h-1 2 · 10-3 hPa Coating, semiconductors (CVD, plasma etching, implantation), pumping pure oxygen
2015 C2 15 m³ · h-1 2 · 10-3 hPa
2021 C2 21 m³ · h-1 2 · 10-3 hPa
2033 C2 30 m³ · h-1 3 · 10-3 hPa
2063 C2 60 m³ · h-1 3 · 10-3 hPa

Table 4.10: Pascal C2 series performance data

Oil types Description Erreichbarer Enddruck Achievable ultimate pressure HenaLine, UnoLine Plus, DuoLine, PentaLine, OktaLine Pascal
P3 Mineral oil for standard applications Extremely low vapor pressure < 1 · 10-3 hPa Air, noncorrosive gases, noble gases
A120 General purpose mineral oil without additives, all-purpose oil for 50 Hz < 3 · 10-3 hPa Air, noncorrosive gases, noble gases; high viscosity
D1 Diester oil for standard and special applications < 5 · 10-2 hPa Air, noncorrosive gases, noble gases, oxygen, mildly aggressive and organic solvents
A155 Synthetic oil on organic ester base < 3 · 10-3 hPa Hydrocarbon vapors, NH3, R134a, refrigerants; oxidation-resistant, resistant to polymerization (low slight deposit)
F4 Perfluoropolyether for special applications < 1 · 10-3 hPa Oxygen, ozone, halogens, organic and inorganic solvents, HCl, BF3, HF for pumps < 20 m³ h-1
F5 for pumps > 20 m³ h-1
A113 Perfluoropolyether synthetic oil < 5 · 10-3 hPa Oxygen, ozone, halogens, organic and inorganic solvents, high resistance to corrosive gases, suitable for plasma etching
A119 General purpose mineral oil without additives, all-purpose oil for 60 Hz < 3 · 10-3 hPa Air, noncorrosive gases, noble gases; low viscosity, therefore good start-up properties at low temperatures
A121 Double-distilled mineral synthetic oil with antioxidant additive < 3 · 10-3 hPa Cyclic pumping at atmospheric pressure, for high temperatures and pressures, resistant to acidic and organic vapors; not suitable for plasma etching
A102 Mineral oil with anti-emulsifier < 3 · 10-2 hPa Oil and water separation (anti-emulsion), water vapor drying and pumping, freeze-drying
A111 Additivated hydro-carbon anti-emulsion mineral oil < 1 · 10-2 hPa Gas circulation and gas return; oxidation-sensitive (not suitable for frequent cycles at atmospheric pressure)
A200 Temperature-stable, mineral synthetic oil < 2 · 10-3 hPa Resistant to corrosive gases and ionizing plasma; low slight backflow
A300 Double-distilled white mineral oil without additives < 5 · 10-3 hPa High resistance to corrosive gases and ionizing plasma; resistant to halogens and Lewis acids; low slight backflow

Table 4.11: Oil types for Backing pumps and Roots pumps

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