4.8.2 Application

A side channel vacuum pump is particularly well suited for generating clean high vacuum. It works completely dry, as it only has one oil-lubricated bearing on the atmosphere side. It is ideally suited for fast evacuation of load locks or transfer chambers, since no backing pumps or bypass lines are required. The pump can be used either as a stand-alone pump or as a backing pump for turbopumps. Corrosive gases, condensates and particulate matter cannot be pumped due to the narrow gaps.