Vacuum Technology Book, Volume II

4.9.3.2 Active magnetic-levitation turbopumps

Table 4.22 contains the characteristics of turbopumps with active 5-axis magnetically levitated bearings.

These pumps, too, are available as:

  • HiPace® M with ISO-K or ISO-F flanges: HiPace turbo drag pumps with Holweck stages for generating high vacuum for standard applications
  • HiPace® M with CF flanges: HiPace turbo drag pumps with Holweck stages for generating ultra-high vacuum
  • ATP M: classic turbopumps without Holweck stages with a high compression ratio for light gases and a high particle tolerance
  • ATH M and MT: Turbo drag pumps with Holweck stages, sealing gas system and heating for corrosive gas applications
ATH M magnetic-levitation turbopump

Figure 4.30: ATH M magnetic-levitation turbopump

Magnetic-levitation turbopump
Model Pumping speed Compression ratio Gas throughput* Applications
HiPace 300 M 255 l · s-1 > 1 · 1011 28 hPa · l · s-1 Analytics, coating, R&D
ATH 500 M / MT 520 l · s-1 > 2 · 107 67 hPa · l · s-1 Semiconductors, coating, R&D
HiPace 700 M 685 l · s-1 > 1 · 1011 13 hPa · l · s-1 Analytics, coating, R&D
HiPace 800 M 790 l · s-1 > 1 · 1011 13 hPa · l · s-1
ATH 1603 M 1,370 l · s-1 > 6 · 108 67 hPa · l · s-1 Semiconductors, coating, R&D: Glass coating, solar cell manufacturing, surface finishing, CVD, PVD / sputtering, ion implantation, plasma physics
ATH 1600 MT 1,370 l · s-1 > 5 · 108 67 hPa · l · s-1
ATH 2303 M 1,950 l · s-1 > 1 · 108 67 hPa · l · s-1
ATH 2300 MT 1,950 l · s-1 > 1 · 108 67 hPa · l · s-1
ATP 2300 M 1,850 l · s-1 > 1 · 108 37 hPa · l · s-1
ATH 2800 M 2,150 l · s-1 > 1 · 108 84 hPa · l · s-1
ATH 2800 MT 2,150 l · s-1 > 1 · 108 84 hPa · l · s-1
ATH 3200 M 2,700 l · s-1 > 1 · 108 84 hPa · l · s-1
ATH 3200 MT 2,700 l · s-1 > 1 · 108 84 hPa · l · s-1

*) The gas throughput depends on the drive.
Table 4.22: Performance data for magnetic-bearing turbopumps for nitrogen

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