Pfeiffer Vacuum

5.3.2 ActiveLine

The ActiveLine family includes three control units and eight active vacuum gauges with 0 – 10 volt analog outputs. All transmitters are equipped with identical connector assemblies and can therefore be operated with the same measurement cable on the control units. Measurement cables are available in standard lengths of 1 to 50 meters.

The active piezo vacuum gauges APR cover five measurement ranges from 5.5 MPa (55 bar) to 10 Pa (0.1 mbar) with six models.

Capacitive diaphragm vacuum gauges CMR are available in the form of both temperature-compensated and temperature-regulated versions, in five measurement ranges each from 1100 hPa – 10-5 hPa. The use of diaphragms with different rated values (full scale = F.S.) results in the following categories:

  • 1,000 hPa F.S. Pressure range 1,100 to 10-1 hPa
  • 100 hPa F.S. Pressure range 110 to 10-2 hPa
  • 10 hPa F.S. Pressure range 11 to 10-3 hPa
  • 1 hPa F.S. Pressure range 1.1 to 10-4 hPa
  • 0.1 hPa F.S. Pressure range 0.11 to 10-5 hPa

These ceramic-technology gauges from Pfeiffer Vacuum have a proven track record in many, especially corrosive applications.

For use in microtechnology with its commonly used units of Torr and mTorr, capacitive diaphragm vacuum gauges CCR can be supplied with rated values in Torr:

  • 1,000 Torr F.S. Pressure range 1,332 to 10-1 hPa
  • 100 Torr F.S. Pressure range 133 to 10-2 hPa
  • 10 Torr F.S. Pressure range 13.3 to 10-3 hPa
  • 1 Torr F.S. Pressure range 1.33 to 10-4 hPa
  • 0.1 Torr F.S. Pressure range 0.13 to 10-5 hPa

The CCR series has D-Sub connector assemblies and its power supply and output voltages are compatible with other commercial capacitive transmitters. Due to these features, however, they cannot be operated with ActiveLine control units.

The range of single-sensor ActiveLine transmitters is rounded off with two active Pirani vacuum gauges TPR for the medium vacuum range of 1,000 hPa to 5 · 10-5 hPa and three active cold cathode vacuum gauges IKR with measuring ranges of 10-2 to 5 · 10-11 hPa.

The TPR Pirani gauges can also be connected to DCU pumping station display control units, thus providing a pressure reading at no additional expense.

The electrodes (anode, cathode, collector) in the sensor of the active hot cathode vacuum gauge IMR 265 are designed with extremely small clearances between each other. Molecular flow therefore prevails, even at pressures p < 10-2 hPa, enabling ion currents there to be measured. An additional advantage of this transmitter is its lower sensitivity to contamination than the Bayard-Alpert design which makes it very suitable for controlling vacuum processes that are primarily in the lower medium vacuum range.

The following active vacuum gauges with combination sensors are available:

  • Capacitive diaphragm-Pirani combination gauge PCR 280 for a pressure range of 1,500 to 5 · 10-4 hPa; a combination of the efficient Pirani sensor with a diaphragm sensor which is accurate in the gross vacuum range
  • Pirani cold-cathode combination gauges PKR 251 and 261 for the pressure range of 1,000 to 5 · 10-9 hPa; the ideal combination of robust sensors for a wide range of vacuum applications
  • Pirani/Bayard-Alpert combination gauge PBR 260 for a pressure range of 1,000 to 5 · 10-10 hPa; ideal pressure measurement in the high and ultra-high vacuum range combined with the safety of the hot cathode filament provided by the Pirani sensor

ActiveLine gauges offer the following advantages:

Coverage of the entire vacuum range

  • Three control units TPG 261, TPG 262 and TPG 256 A for one, two or six measuring instruments for all requirement profiles
  • Control units with automatic gauge recognition prevent installation faults
  • Each vacuum gauge can be operated with any control unit
  • Easy cabling through use of identical standard cable for all gauges
ActiveLine application concepts

Figure 5.10: ActiveLine application concepts

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