Facilities & Maintenance

Any single leak present on a semiconductor tool and its related facilities can impact manufacturing throughput and yield. Consequences vary from loss of production due to process specs not met, to critical safety hazard. Therefore, leak detection is a critical and mandatory step of any new tool commissioning in the clean room or after any maintenance intervention. At the basement level, forelines & dry pumps are also regularly exchanged for cleaning or repair. We provide comprehensive leak detection solutions which guarantee vacuum integrity of your installation from process chambers down to gas abatement. Our goal: Maximize your production yield.

Applications

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