Inspection & Metrology

As semiconductor device manufacturing become more and more complex with increased number of steps, wafer inspection and metrology are more critical than ever. Besides vacuum solutions for traditional inspection & metrology tools, we provide innovative in-line Airborne Molecular Contamination (AMC) systems for Front Opening Universal Pods (FOUP) and clean room environment analysis. With our AMC systems, wafers are analyzed through the production cycle, contributing to increase manufacturing yield.

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