Wafer handling

Manufacturing of a semiconductor component is a very complex process, involving many steps under vacuum environment. Wafers enter or exit a semiconductor tool through load-lock chambers, in order to guarantee the right vacuum level. Wafers are moved from process chamber A to B through transfer modules, which are also maintained under vacuum. We provide high vacuum turbopumps and primary dry pumps solutions dedicated to wafer handling applications, and designed for the highest throughput and lowest operating costs.

Applications

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