| Backing pump | MVP 070-3 |
| Connection flange (in) | DN 100 CF-F |
| Connection flange (out) | G 1/2, G 1/4 |
| Cooling method | Air |
| Final pressure | < 1 · 10-8 hPa | < 7.5 · 10-9 Torr | < 1 · 10-8 mbar |
| Final pressure without gas ballast | < 1 · 10-8 hPa | < 7.5 · 10-9 Torr | < 1 · 10-8 mbar |
| Fore-vacuum safety valve | No |
| Mains connection | 200 – 230 V AC, 50/60 Hz |
| Power consumption max. | 1010 W |
| Pumping speed backing pump at 50 Hz | 3.8 m³/h | 2.24 cfm | 63.33 l/min |
| Pumping speed for N2 | 260 l/s |
| Sound pressure level | ≤50 dB(A) |
| Turbopump | HiPace 300 |
| Type | Turbo pumping station |
| Weight | 45.2 kg | 99.65 lb |
| UHV gate valve, DN 100 CF, metric, electro-pneumatic, PI (RS)/PV 24 V DC, SS/Cu/FKM | GVMP-S08542 |
| OmniControl 200 mit PKR 361, 40 CF | PT 440 957 -T |
| File | Type | Language | Date | Filesize | |
|---|---|---|---|---|---|
| Data sheet | EN | 02-08-2023 | ~ 484.5 KB | ||
| T | +1 (800) 248-8254 |
| F | +1 (888) 658-7983 |
