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Two-stage Rotary Vane Pumps - Pfeiffer Vacuum

Corrosive version (PFPE)

These corrosive versions of our rotary vane pumps are prepared for operation with Pfeiffer Vacuum perfluoropolyether (PFPE) operating fluids. Due to the inert operating fluid, these pumps can be used in highly corrosive processes. PFPE operating fluids must be ordered separately.

Applications

  • CVD coating
  • Coating (wear protection)
  • Semiconductor technology
  • Research and development

Customer value

  • Space-saving and ideal for systems integration
  • High pumping speeds with small dimensions
  • Low ultimate pressure
  • Operational safety, uses special materials for contact with corrosive substances
  • Longer useful life through use of chemically inert operating fluid

Pascal 2010 C2 (10 m3/h)

  • Suitable for the most aggressive pumping environment
  • Specific anti-corrosion features
  • Designed and prepared for PFPE fluids
  • Bubbler purge provides continuous nitrogen injection into the oil (resulting in 10 °C lower operation temperature and reduced corrosion rate due to uniform degassing)
  • Compact design
  • Adjustable inlet and outlet ports, horizontal or vertical orientation for better integration
  • Universal 1-phase motors (high & low voltage, 50/60 Hz)
  • Easy integration by large OEMs
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Pascal 2010 C2 1-ph motor 180 – 254 V 180 – 254 V 210C2MHEN
Pascal 2010 C2 1-ph motor 90 – 132 V 90 – 132 V 210C2MLAN
Pascal 2010 C2 3-ph motor 342 – 460 V 342 – 520 V 210C2THEN
Pascal 2010 C2 3-ph motor 342 – 460 V 342 – 520 V 210C2TLAN

Pascal 2015 C2 (15 m3/h)

  • Suitable for the most aggressive pumping environment
  • Specific anti-corrosion features
  • Designed and prepared for PFPE fluids
  • Bubbler purge provides continuous nitrogen injection into the oil (resulting in 10 °C lower operation temperature and reduced corrosion rate due to uniform degassing)
  • Compact design
  • Adjustable inlet and outlet ports, horizontal or vertical orientation for better integration
  • Universal 1-phase motors (high & low voltage, 50/60 Hz)
  • Easy integration by large OEMs
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Pascal 2015 C2 1-ph motor 90 – 132 V 90 – 132 V 215C2MHEN
Pascal 2015 C2 1-ph motor 90 – 132 V 90 – 132 V 215C2MLAN
Pascal 2015 C2 3-ph motor 342 – 460 V 342 – 520 V 215C2THEN
Pascal 2015 C2 3-ph motor 170 – 254 V 170 – 300 V 215C2TLAN

Pascal 2021 C2 (21 m3/h)

  • Suitable for the most aggressive pumping environment
  • Specific anti-corrosion features
  • Designed and prepared for PFPE fluids
  • Bubbler purge provides continuous nitrogen injection into the oil (resulting in 10 °C lower operation temperature and reduced corrosion rate due to uniform degassing)
  • Compact design
  • Adjustable inlet and outlet ports, horizontal or vertical orientation for better integration
  • Universal 1-phase motors (high & low voltage, 50/60 Hz)
  • Easy integration by large OEMs
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Pascal 2021 C2 1-ph motor 180 – 254 V 180 – 254 V 221C2MHEN
Pascal 2021 C2 1-ph motor 90 – 132 V 90 – 132 V 221C2MLAN
Pascal 2021 C2 3-ph motor 342 – 460 V 342 – 520 V 221C2THEN
Pascal 2021 C2 3-ph motor 170 – 254 V 170 – 300 V 221C2TLAN

Duo 35/M

  • Reliable, clean, low maintenance
  • Integrated safety and gas ballast valve
  • Special feature: Various motor voltages for worldwide employment
  • Contain no non-ferrous metals
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 35 C 3-ph motor 230/400 V 265/460 V PK D45 202
Duo 35 C 3-ph motor 220/380 V PK D45 242

Duo 65/M

  • Reliable, clean, low maintenance
  • Integrated safety and gas ballast valve
  • Special feature: Various motor voltages for worldwide employment
  • Contain no non-ferrous metals
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 65 C 3-ph motor 230/400 V 265/460 V PK D46 202
Duo 65 C 3-ph motor 220/380 V PK D46 242
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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