Select & Request Contact now
  1. Home
  2. Products
  3. Vacuum Generation
  4. Rotary Vane Pumps
  5. Two-stage
  6. Corrosive version (PFPE)

Corrosive version (PFPE)

These corrosive versions of our rotary vane pumps are prepared for operation with Pfeiffer Vacuum Perfluoropolyether (PFPE) operating fluids. Thanks to the inert operating fluid, these pumps can be used in highly corrosive processes. PFPE operating fluids must be ordered separately.

Applications

  • CVD coating
  • Coating (wear protection)
  • Semiconductor technology
  • Research and development

Customer value

  • Space-saving and ideal for systems integration
  • High pumping speeds with small dimensions
  • Low ultimate pressure
  • Offers high operational reliability, uses special materials for contact with corrosive substances
  • Longer useful life through use of chemically inert operating fluid

Pascal 2010 C2 (10 m3/h)

  • Increased resistance thanks to special materials
  • Very low ultimate pressure, ideal for medium vacuum applications
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Type designation Motor type Mains connection: voltage 50 Hz Mains connection: voltage 60 Hz Part number
Pascal 2010 C2 1-ph motor 180 – 254 V 180 – 254 V 210C2MHEN
Pascal 2010 C2 1-ph motor 90 – 132 V 90 – 132 V 210C2MLAN
Pascal 2010 C2 3-ph motor 342 – 460 V 342 – 520 V 210C2THEN
Pascal 2010 C2 3-ph motor 342 – 460 V 342 – 520 V 210C2TLAN

Pascal 2015 C2 (15 m3/h)

  • Increased resistance thanks to special materials
  • Very low ultimate pressure, ideal for medium vacuum applications
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Type designation Motor type Mains connection: voltage 50 Hz Mains connection: voltage 60 Hz Part number
Pascal 2015 C2 1-ph motor 180 – 254 V 180 – 254 V 215C2MHEN
Pascal 2015 C2 1-ph motor 90 – 132 V 90 – 132 V 215C2MLAN
Pascal 2015 C2 3-ph motor 342 – 460 V 342 – 520 V 215C2THEN
Pascal 2015 C2 3-ph motor 170 – 254 V 170 – 300 V 215C2TLAN

Pascal 2021 C2 (21 m3/h)

  • Increased resistance thanks to special materials
  • Very low ultimate pressure, ideal for medium vacuum applications
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Type designation Motor type Mains connection: voltage 50 Hz Mains connection: voltage 60 Hz Part number
Pascal 2021 C2 1-ph motor 180 – 254 V 180 – 254 V 221C2MHEN
Pascal 2021 C2 1-ph motor 90 – 132 V 90 – 132 V 221C2MLAN
Pascal 2021 C2 3-ph motor 342 – 460 V 342 – 520 V 221C2THEN
Pascal 2021 C2 3-ph motor 170 – 254 V 170 – 300 V 221C2TLAN

Duo 35 C

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • Optionally with magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Type designation Motor type Mains connection: voltage 50 Hz Mains connection: voltage 60 Hz Part number
Duo 35 C 3-ph motor 230/400 V 265/460 V PK D45 202
Duo 35 C 3-ph motor 220/380 V PK D45 242

Duo 65 C

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • Optionally with magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Type designation Motor type Mains connection: voltage 50 Hz Mains connection: voltage 60 Hz Part number
Duo 65 C 3-ph motor 230/400 V 265/460 V PK D46 202
Duo 65 C 3-ph motor 220/380 V PK D46 242
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T  +1 (800) 248-8254
F  +1 (888) 658-7983
write message