Magnetically coupled corrosive version (PFPE)

These corrosive versions of our rotary vane pumps are prepared for operation with Pfeiffer Vacuum perfluoropolyether (PFPE) operating fluids. Due to the inert operating fluid, these pumps can be used in highly corrosive processes. By using the magnetic coupling, the integral leak rate of these pumps is less than 1 · 10-7 Pa m3/s. This maximizes the operating reliability in corrosive applications. PFPE operating fluids must be ordered separately.

Applications

  • CVD coating
  • Coating (wear protection)
  • Semiconductor technology
  • Research and development

Customer value

  • Space-saving and ideal for systems integration
  • High pumping speeds with small dimensions
  • Low ultimate pressure
  • Operational safety, uses special materials for contact with corrosive substances
  • Longer useful life through use of chemically inert operating fluid
  • Extremely high safety through hermetically sealed design

Duo 3 MC

  • Increased resistance thanks to special materials
  • Minimal space requirement due to compact design
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids

Duo 6 MC

  • Increased resistance thanks to special materials
  • Minimal space requirement due to compact design
  • Highest water vapor compatibility
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids

Duo 11 MC

  • Increased resistance thanks to special materials
  • Minimal space requirement due to compact design
  • Highest water vapor compatibility
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids

Duo 20 MC

  • Increased resistance thanks to special materials
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids

Duo 35 MC

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • With maintenance-free magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids

Duo 65 MC

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • With maintenance-free magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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