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Two-stage Rotary Vane Pumps - Pfeiffer Vacuum

Magnetically coupled corrosive version (PFPE)

These corrosive versions of our rotary vane pumps are prepared for operation with Pfeiffer Vacuum perfluoropolyether (PFPE) operating fluids. Due to the inert operating fluid, these pumps can be used in highly corrosive processes. By using the magnetic coupling, the integral leak rate of these pumps is less than 1 · 10-7 Pa m3/s. This maximizes the operating reliability in corrosive applications. PFPE operating fluids must be ordered separately.

Applications

  • CVD coating
  • Coating (wear protection)
  • Semiconductor technology
  • Research and development

Customer value

  • Space-saving and ideal for systems integration
  • High pumping speeds with small dimensions
  • Low ultimate pressure
  • Operational safety, uses special materials for contact with corrosive substances
  • Longer useful life through use of chemically inert operating fluid
  • Extremely high safety through hermetically sealed design

Duo 5 M

  • Reliable, clean, low maintenance
  • Compact design - Excellent performance data
  • Integrated safety and gas ballast valve
  • Contain no non-ferrous metals
  • Special feature: Various motor voltages for worldwide employment
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 5 MC 1-ph motor 95 – 120 V 208 – 240 V PK D61 727
Duo 5 MC 1-ph motor 200 – 240 V 208 – 240 V PK D61 732

Duo 10 M

  • Reliable, clean, low maintenance
  • Compact design - Excellent performance data
  • Contain no non- ferrous metals
  • Integrated safety and gas ballast valve
  • Special feature: Various motor voltages for worldwide employment
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 10 MC 1-ph motor 100 – 110 V 100 – 120 V PK D62 727
Duo 10 MC 1-ph motor 200 – 230 V 200 – 240 V PK D62 732

Duo 20 M

  • Reliable, clean, low maintenance
  • Compact design - Excellent performance data
  • Integrated safety and gas ballast valve
  • Special feature: Various motor voltages for worldwide employment
  • Contain no non-ferrous metals
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 20 MC 1-ph motor 100 – 110 V 100 – 120 V PK D63 727
Duo 20 MC 1-ph motor 200 – 230 V 200 – 240 V PK D63 732

Duo 35/M

  • Reliable, clean, low maintenance
  • Integrated safety and gas ballast valve
  • Special feature: Various motor voltages for worldwide employment
  • Contain no non-ferrous metals
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 35 MC 3-ph motor 230/400 V 265/460 V PK D45 027

Duo 65/M

  • Reliable, clean, low maintenance
  • Integrated safety and gas ballast valve
  • Special feature: Various motor voltages for worldwide employment
  • Contain no non-ferrous metals
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 65 MC 3-ph motor 230/400 V 265/460 V PK D46 036
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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