Two-stage Rotary Vane Pumps - Pfeiffer Vacuum

Magnetically coupled corrosive version (PFPE)

These corrosive versions of our rotary vane pumps are prepared for operation with Pfeiffer Vacuum perfluoropolyether (PFPE) operating fluids. Due to the inert operating fluid, these pumps can be used in highly corrosive processes. By using the magnetic coupling, the integral leak rate of these pumps is less than 1 · 10-7 Pa m3/s. This maximizes the operating reliability in corrosive applications. PFPE operating fluids must be ordered separately.

Applications

  • CVD coating
  • Coating (wear protection)
  • Semiconductor technology
  • Research and development

Customer value

  • Space-saving and ideal for systems integration
  • High pumping speeds with small dimensions
  • Low ultimate pressure
  • Operational safety, uses special materials for contact with corrosive substances
  • Longer useful life through use of chemically inert operating fluid
  • Extremely high safety through hermetically sealed design

Duo 5 M

  • Increased resistance thanks to special materials
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 5 MC 1-ph motor 95 – 120 V 208 – 240 V PK D61 727
Duo 5 MC 1-ph motor 200 – 240 V 208 – 240 V PK D61 732

Duo 10 M

  • Increased resistance thanks to special materials
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 10 MC 1-ph motor 100 – 110 V 100 – 120 V PK D62 727
Duo 10 MC 1-ph motor 200 – 230 V 200 – 240 V PK D62 732

Duo 20 M

  • Increased resistance thanks to special materials
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 20 MC 1-ph motor 100 – 110 V 100 – 120 V PK D63 727
Duo 20 MC 1-ph motor 200 – 230 V 200 – 240 V PK D63 732

Duo 35/M

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • With maintenance-free magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 35 MC 3-ph motor 230/400 V 265/460 V PK D45 027

Duo 65/M

  • Increased resistance thanks to special materials
  • Rugged design for demanding industrial applications and longest service intervals
  • Flexible use due to extensive accessories program
  • With maintenance-free magnetic coupling
  • Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
  • Prepared for PFPE operating fluids
Classification Motor version Mains requirement: voltage 50 Hz Mains requirement: voltage 60 Hz Order number
Duo 65 MC 3-ph motor 230/400 V 265/460 V PK D46 036

Duo 3 MC

  • Increased resistance thanks to special materials
  • Minimal space requirement due to compact design
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids

Duo 6 MC

  • Increased resistance thanks to special materials
  • Minimal space requirement due to compact design
  • Highest water vapor compatibility
  • Single-phase universal motor available, allowing an almost worldwide network coverage
  • With maintenance-free magnetic coupling
  • Prepared for PFPE operating fluids
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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