These corrosive versions of our rotary vane pumps are prepared for operation with Pfeiffer Vacuum perfluoropolyether (PFPE) operating fluids. Due to the inert operating fluid, these pumps can be used in highly corrosive processes. By using the magnetic coupling, the integral leak rate of these pumps is less than 1 · 10-7 Pa m3/s. This maximizes the operating reliability in corrosive applications. PFPE operating fluids must be ordered separately.
Applications
CVD coating
Coating (wear protection)
Semiconductor technology
Research and development
Customer value
Space-saving and ideal for systems integration
High pumping speeds with small dimensions
Low ultimate pressure
Operational safety, uses special materials for contact with corrosive substances
Longer useful life through use of chemically inert operating fluid
Extremely high safety through hermetically sealed design
Duo 3 MC
Increased resistance thanks to special materials
Minimal space requirement due to compact design
Single-phase universal motor available, allowing an almost worldwide network coverage
With maintenance-free magnetic coupling
Prepared for PFPE operating fluids
Type designation
Motor type
Mains connection: voltage 50 Hz
Mains connection: voltage 60 Hz
Part number
Duo 3 MC
1-ph motor
115/230 V
115/230 V
PK D57 211
Duo 6 MC
Increased resistance thanks to special materials
Minimal space requirement due to compact design
Highest water vapor compatibility
Single-phase universal motor available, allowing an almost worldwide network coverage
With maintenance-free magnetic coupling
Prepared for PFPE operating fluids
Type designation
Motor type
Mains connection: voltage 50 Hz
Mains connection: voltage 60 Hz
Part number
Duo 6 MC
1-ph motor
115/230 V
115/230 V
PK D58 211
Duo 11 MC
Increased resistance thanks to special materials
Minimal space requirement due to compact design
Highest water vapor compatibility
Single-phase universal motor available, allowing an almost worldwide network coverage
With maintenance-free magnetic coupling
Prepared for PFPE operating fluids
Type designation
Motor type
Mains connection: voltage 50 Hz
Mains connection: voltage 60 Hz
Part number
Duo 11 MC
1-ph motor
115/230 V
115 V/230 V
PK D59 211
Duo 11 MC
1-ph motor
200 – 240 V
200 – 240 V
PK D59 212
Duo 20 MC
Increased resistance thanks to special materials
With maintenance-free magnetic coupling
Prepared for PFPE operating fluids
Type designation
Motor type
Mains connection: voltage 50 Hz
Mains connection: voltage 60 Hz
Part number
Duo 20 MC
1-ph motor
100 – 110 V
100 – 120 V
PK D63 727
Duo 20 MC
1-ph motor
200 – 230 V
200 – 240 V
PK D63 732
Duo 35 MC
Increased resistance thanks to special materials
Rugged design for demanding industrial applications and longest service intervals
Flexible use due to extensive accessories program
With maintenance-free magnetic coupling
Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
Prepared for PFPE operating fluids
Type designation
Motor type
Mains connection: voltage 50 Hz
Mains connection: voltage 60 Hz
Part number
Duo 35 MC
3-ph motor
230/400 V
265/460 V
PK D45 027
Duo 65 MC
Increased resistance thanks to special materials
Rugged design for demanding industrial applications and longest service intervals
Flexible use due to extensive accessories program
With maintenance-free magnetic coupling
Adjustable inlet and outlet ports in horizontal or vertical orientation for better integration
Prepared for PFPE operating fluids
Type designation
Motor type
Mains connection: voltage 50 Hz
Mains connection: voltage 60 Hz
Part number
Duo 65 MC
3-ph motor
230/400 V
265/460 V
PK D46 036
Duo 65 MC
3-ph motor
220/380 V
PK D46 025
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA