We provide advanced contamination management solutions that enable semiconductor manufacturers to monitor clean room environments in real time. By detecting contaminants early, our solutions help minimize yield loss.

Our range of dry vacuum pumps includes screw vacuum and multi-stage Roots vacuum pumps.

In the semiconductor industry, vacuum environments must comply with stringent clean room standards. All components, including vacuum pumps, are required to meet highly specific industry regulations.

Vacuum levels in the semiconductor industry must be precisely selected based on the specific application, tool type, and process recipe. Each deposition and etching process – such as ALD, PECVD, CVD, and PVD – requires a controlled vacuum level and pressure, as well as compatibility with various process gases.

Yes, Pfeiffer delivers customized vacuum systems tailored to the specific needs of semiconductor manufacturers. We combine a wide portfolio of robust, energy-efficient products with deep technical expertise to design solutions across all vacuum regimes – from atmospheric pressure to ultra-high vacuum.

Vacuum pumps play a critical role in maintaining the ultra-clean environments required for semiconductor processes such as deposition, etching, PVD, lithography, plasma etching, and ALD. By ensuring stable vacuum conditions, they help prevent particle contamination and enable the high precision needed for wafer manufacturing.

Vacuum is essential across all wafer technologies – from traditional silicon to advanced materials like silicon carbide (SiC) and gallium nitride (GaN).

Yes. We offer a broad range of semiconductor products – such as vacuum pumps and process gas abatement systems – engineered with advanced technologies to minimize energy, nitrogen, and water usage. Our solutions are aligned with the industry’s sustainability goals, helping manufacturers lower their environmental footprint without compromising performance.

A wide thermal range enables our dry vacuum pumps to effectively handle various process gases – from sensitive precursors at lower temperatures to condensable gases at higher temperatures. This capability helps prevent material buildup inside the vacuum system, ensuring stable operation, enhanced reliability, and extended product lifetime in demanding semiconductor applications.

This thermal flexibility is achieved through specialized components integrated into our products. Please contact us to find the best solution for your specific process requirements.