Reliable
Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle
High performance
Optimized rotor geometry, enhanced gas load handling
High gas throughput
High pumping speed, compatible with a variety of backing pumps, high compression for light gases
Technical specifications
Markets & applications
Analytics and R&D
-
Mass Spectrometry
-
Space Research
-
Ultra-High Vacuum
Electric power generation
-
Green Energy Generation
Hospitals and healthcare facilities
-
Mass spectromer
-
Medical Accelerator
-
Diagnostic Imaging
Scientific instruments
-
Mass Spectrometry
-
Surface Analysis
Semiconductor applications
-
PVD
-
Inspection & Metrology
-
Metal & high K etch
-
LPCVD / Diffusion
-
Lithography
-
Oxyde Etch
-
Stripping / Ashing
-
ALD
-
PECVD
-
Si Poly etch
-
Load Lock & Transfer
-
Light deposition
-
Ion Implantation
Technical gases
-
Bottle Filling
Accessories
- Electrical adapter
- Mains cable
- Connecting cable
- Various fieldbus systems
- Power supply kit and display unit
- Mounting kit
- Safety valve
- Venting accessories
- Power failure venting unit
- Vibration damper