Reliable
Best-in-class hybrid bearing technology, long life cycle, maximum uptime
Low magnetic stray field
Ideal for high-sensitivity applications such as high-resolution electron microscopes
Quiet
Low noise and vibration levels thanks to embedded bearing combined with patented laser balancing technology
Technical specifications
Markets & applications
Automotive and transport
-
Heat Treatment
Metallurgy
-
Vacuum Brazing / Soldering
-
Heat Treatment
Semiconductor applications
-
PVD
-
Inspection & Metrology
-
Metal & high K etch
-
LPCVD / Diffusion
-
Lithography
-
Oxyde Etch
-
Stripping / Ashing
-
ALD
-
PECVD
-
Si Poly etch
-
Load Lock & Transfer
-
Light deposition
-
Ion Implantation