Flexible
Adjustable settings to match individual process requirements
Robust
Advanced temperature management, corrosion-resistant material, protection against premature wear and condensation
Efficient
Dry and energy-efficient
Technical specifications
Markets & applications
Flat panel display production
-
Physical vapor deposition (PVD)
Semiconductor applications
-
PVD
-
Metal & high K etch
-
LPCVD / Diffusion
-
Lithography
-
Oxyde Etch
-
Stripping / Ashing
-
ALD
-
PECVD
-
Cobalt, WCVD, TiN & TDMAT
-
Annealing
-
Si Poly etch
-
Load Lock & Transfer
-
Light deposition
Solar power industry
-
Cell Manufacturing
Thin film coating
-
Lab coating